Indium-rich AlInN are grown by metal-organic(MO) chemical vapor deposition using
trimethylaluminum, trimethylindium, and ammonia. Under the conservation of MO influx, the
effects of gas flow in the MO route on AlInN growth and Al-related parasitic reaction are
investigated. With an increase in this gas flow, the suppression of Al-related parasitic reaction, i.e.,
enhancement in Al content incorporation and improvement of crystalline quality, is satisfactorily
shown until the occurring of severe phase separation. Accordingly, Al content x in AlxIn1−xN can be
tuned from x=0.02 to 0.26. The Raman spectra of those AlInN samples with phase separation are
analyzed by the resonant excitation effect and two-mode behavior for A1(LO). Finally, we propose
a phase diagram to interpret the phase separation and Al content evolution under the influence of gas flow