2013
DOI: 10.1007/s00339-013-8108-2
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Rapid microfabrication of transparent materials using filamented femtosecond laser pulses

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Cited by 40 publications
(14 citation statements)
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“…In the studied case, for the femtosecond pulse-generated light filament formation and its efficient application for rapid fabrication at employed irradiation conditions, a 10-fold higher average power was used as compared to the sharp focusing case. Structuring efficiency in terms of area (volume) per time scaled with laser power almost linearly within the examined range, as the beam's peak power was exceeding the threshold of modification several times [47]). Hence, a higher power fs laser can be implemented to further increase the fabrication throughput.…”
Section: Characteristics Of Light Filament-assisted Vs Sharp Beam Fomentioning
confidence: 83%
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“…In the studied case, for the femtosecond pulse-generated light filament formation and its efficient application for rapid fabrication at employed irradiation conditions, a 10-fold higher average power was used as compared to the sharp focusing case. Structuring efficiency in terms of area (volume) per time scaled with laser power almost linearly within the examined range, as the beam's peak power was exceeding the threshold of modification several times [47]). Hence, a higher power fs laser can be implemented to further increase the fabrication throughput.…”
Section: Characteristics Of Light Filament-assisted Vs Sharp Beam Fomentioning
confidence: 83%
“…For the FPF, the processable sample was immersed in water, and the immersion depth was chosen to be approximately 0.5 mm. Typical writing parameters for FPF were: focal spot diameter equal to 55 µm and average laser power set to 5 W. One can find more detailed information regarding light filament formation in liquids and its assisted rapid fabrication elsewhere [47,51]. In the case of focused beam fabrication, the sample was raster scanned in the X-Y plane followed by change in Z direction.…”
Section: Direct Laser Writing By Ablationmentioning
confidence: 99%
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“…In this paper, we present cutting and drilling results for metallic and dielectric material fabrication by employing a novel micromachining approach [32,33]. We demonstrate that the addition of a thin water layer on top of the samples results in superior micromachining quality and throughput due to additional spatial shaping of ultrashort pulses, cooling and the cleaning properties of the covering fluid.…”
Section: Introductionmentioning
confidence: 99%