Mems/Nems
DOI: 10.1007/0-387-25786-1_20
|View full text |Cite
|
Sign up to set email alerts
|

Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
10
0

Publication Types

Select...
4
2
1

Relationship

0
7

Authors

Journals

citations
Cited by 14 publications
(10 citation statements)
references
References 201 publications
0
10
0
Order By: Relevance
“…Consequently, after sintering,the density of sintered part is low. [24,25] This leads to unsatisfactory piezoelectric properties.…”
Section: Introductionmentioning
confidence: 97%
“…Consequently, after sintering,the density of sintered part is low. [24,25] This leads to unsatisfactory piezoelectric properties.…”
Section: Introductionmentioning
confidence: 97%
“…The model is built in layers by scanning and curing the surface of the liquid photopolymer with lasers which have UV output. Initially, He-Cd (325 nm) or Ar Ion lasers (351 nm) were used but developments in the last 10 years in laser technology and since the evolution from RP to RM, diode-pumped, solid-state, Q-switched lasers are increasingly being used, typically emitting at 355 nm with output powers from 0.5 to 2 W and a pulse-width in the 10-30 ns range [39][40][41]. First the contours are scanned corresponding to the cross-section, then scanning of a hatch pattern fills in the rest.…”
Section: Liquid Based Systemsmentioning
confidence: 99%
“…Typically, these are acrylic or epoxy photopolymers; however, unsaturated polyesters or urethanes or hybrid systems consisting of a combination of the two, can be used [41]. Somos ® 7110 and Renshape ™ 5260 were identified to contain epoxy and acrylic functional groups, aromatics and aliphatic ether groups [42], Flex SL was identified as a polyether (meth)acrylate-based resin [43], and Accura ® SI40 is an epoxy photopolymer resin specifically designed for rapid manufacturing rather than prototyping, with properties considered to be closer to traditional engineering plastics [44].…”
Section: Renshapementioning
confidence: 99%
“…The micro parts are built in a point-by-point and line-by-line fashion (Hanemann et al, 2006). In a vector-by-vector micro-SLA system, similar to regular SLA discussed in Section 14.3.1, the laser beam is deflected by galvanometer-driven mirrors.…”
Section: Micro-manufacturing Rp Systemsmentioning
confidence: 99%