“…Microelectromechanical systems (MEMS) scanning mirrors are widely used in a variety of applications such as Fourier transform (FT) spectroscopy [1,2], confocal microscopy [3], optical coherence tomography [4,5], optical switches [6], and projection displays [7]. Scan range, speed, driving voltage, power consumption and footprint are among the key parameters for MEMS scanning mirrors.…”