Recent developments in thin film electro-acoustic technology for biosensor applications

Katardjiev, Ilia; Yantchev, Ventsislav

doi:10.1016/j.vacuum.2011.10.012

Cited by 71 publications

(34 citation statements)

References 61 publications

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“…[9][10][11][12][13][14][15][16] Recently, there has been an increasing interest in SAW based microfluidic devices using high performance piezoelectric thin film materials, such as ZnO. [17][18][19][20][21] These ZnO films, typically a few micron thick, deposited on silicon, glass, or polymer, have advantages compared with using bulk materials such as LiNbO 3 or quartz. This is related to the ease with which it can be integrated with microelectronic integrated circuits and micro-devices, as well as many other sensing or microfluidic technologies.…”

mentioning

confidence: 99%

“…There have been previous references on SAW induced streaming and pumping using the ZnO based SAW devices. [17][18][19][20][21] However, up to now, there has been no literature exploring nebulization or atomisation phenomena using ZnO film SAW devices. ZnO has a lower electro-mechanical coupling coefficient than LiNbO 3 , so it is not clear whether a SAW devices made of a few microns of ZnO on a silicon or glass substrate will perform nebulization similar to (if not better than) those made from the bulk material (normally with thickness of >500 microns).…”

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confidence: 99%

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Surface acoustic wave nebulization on nanocrystalline ZnO film

Zhao

et al. 2012

Applied Physics Letters

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Surface acoustic wave (SAW) nebulization/atomization has been realised on thin ZnO film based SAW devices. The surface acoustic wave nebulization (SAWN) process has been observed to produce significant mist generation and ejected satellite droplets. By modifying the geometry of the interdigitated transducers to reduce the wavelengths from 400 μm to 120 μm, higher frequency SAWN has been achieved by increasing radio frequency driving frequencies from 11.8 MHz to 37.2 MHz, respectively. Compared with the commonly used LiNbO3 SAWN devices, ZnO film devices exhibit better thermal dissipation, and to date, they have shown no susceptibility to substrate failure during fabrication or operation. They also have the added advantage of the technology being suitable for direct integration with microsystems and integrated circuit microelectronics.

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confidence: 99%

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confidence: 99%

Surface acoustic wave nebulization on nanocrystalline ZnO film

Zhao

et al. 2012

Applied Physics Letters

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“…TEA sensors offer resolutions comparable and sometimes even better than their bulk crystal counterparts [2], while providing easier integration and compact sizes. Advances in the TEA field have been possible mainly owing to the successful growth of thin piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

Mirea

Iborra

Yantchev

2016

2016 European Frequency and Time Forum (EFTF)

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Sensors capable of in-liquid operation are of primary importance not only for biosensors applications but also for liquid monitoring. Thin film electroacoustic (TEA) devices have emerged as promising choice for such applications. The most common TEA devices are the thin film bulk acoustic wave resonator (FBAR) and the Lamb wave resonator (LWR). FBAR operating on the shear mode have been widely studied in view of biosensors applications. A theoretical framework describing the in-liquid sensitivity features of LWR employing the S0 mode (S0-LWR) has been experimentally proven recently. However, a comparison between both devices has not been performed yet. Here we theoretically and experimentally compare AlN-based S0-LWR and FBARs on their solidly mounted modality (SMR), in terms of their in-liquid sensitivity features at similar frequencies.S0-LWR prove to be slightly more sensitive to the density and viscosity of the liquids. Moreover, if a metallic bottom electrode is not deposited on their backside they can also sense variations in the dielectric permittivity of the liquid, which cannot be done with common SMRs.

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“…6,8,23 Recently, there has been an increased interest in SAW based microfluidic devices using high performance thin film piezoelectric materials, such as ZnO. [24][25][26][27][28][29] Generally, the attenuation length, L SAW , of the SAW into a liquid can be estimated using 18,30 …”

Section: Introductionmentioning

confidence: 99%

High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Guo

et al. 2014

Journal of Applied Physics

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Rayleigh surface acoustic wave (SAW) devices based on 128° YX LiNbO3 and ZnO/Si substrates with different resonant frequencies from ∼62 MHz to ∼275 MHz were fabricated and characterized. Effects of SAW frequency and power on microfluidic performance (including streaming, pumping, and jetting) were investigated. SAW excitation frequency influenced the SAW attenuation length and hence the acoustic energy absorbed by the liquid. At higher frequencies (e.g., above 100 MHz), the SAW dissipated into liquid decays more rapidly with much shorter decay lengths. Increasing the radio frequency (RF) frequencies of the devices resulted in an increased power threshold for streaming, pumping, and especially jetting, which is attributed to an increased absorption rate of acoustic wave energy. ZnO SAW devices could achieve similar streaming, pumping, and jetting effects as well as frequency effect, although the SAW signals are relatively weaker.

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Recent developments in thin film electro-acoustic technology for biosensor applications

Cited by 71 publications

References 61 publications

Surface acoustic wave nebulization on nanocrystalline ZnO film

Surface acoustic wave nebulization on nanocrystalline ZnO film

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

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