2014
DOI: 10.1088/0268-1242/29/11/113001
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Recent progress in metal-organic chemical vapor deposition of $\left( 000\bar{1} \right)$ N-polar group-III nitrides

Abstract: Progress in metal-organic chemical vapor deposition of high quality ( ) 0001 ¯N-polar (Al, Ga, In)N films on sapphire, silicon carbide and silicon substrates is reviewed with focus on key process components such as utilization of vicinal substrates, conditions ensuring a high surface mobility of species participating in the growth process, and low impurity incorporation. The high quality of the fabricated films enabled the demonstration of N-polar (Al, Ga, In)N based devices with excellent performance for tran… Show more

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Cited by 187 publications
(149 citation statements)
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“…More recently nonpolar in the a-and m-direction has been investigated where the surface is formed by the m-({1-100}) and a-plane ({11-20}), respectively (27). III-nitride semiconductors are typically grown by several different methods and on nonlatticed matched substrates such as sapphire, SiC, or Si (28). A large lattice mismatch between non-native substrates and III-nitride layers leads to high dislocation densities, strain, and reduced crystal quality of the layers.…”
Section: Iii-nitride Materials' Properties With Importance To Biosensorsmentioning
confidence: 99%
“…More recently nonpolar in the a-and m-direction has been investigated where the surface is formed by the m-({1-100}) and a-plane ({11-20}), respectively (27). III-nitride semiconductors are typically grown by several different methods and on nonlatticed matched substrates such as sapphire, SiC, or Si (28). A large lattice mismatch between non-native substrates and III-nitride layers leads to high dislocation densities, strain, and reduced crystal quality of the layers.…”
Section: Iii-nitride Materials' Properties With Importance To Biosensorsmentioning
confidence: 99%
“…This helps reduce the gate–channel distance in HEMTs, and the back barrier provided by the AlGaN layer makes the carrier confinement stronger in comparison with Ga‐polar GaN HEMTs. Successful growth and device application of N‐polar GaN materials have been reported from different groups. In particular, the superior power performance of N‐polar GaN HEMTs compared with their Ga‐polar counterparts has been demonstrated in high frequencies over 90 GHz .…”
Section: Introductionmentioning
confidence: 99%
“…The most intense investigations of crystal growth focus on in its Ga-polar (0001) orientation because it is easier to obtain stable process with smooth surfaces of this polarization. However growth at N-polar GaN(0001) surface focuses recently more and more attention because of wide variety of applications as solar cells, sensors, high electron mobility transistors and light emitting diodes [5][6][7]. There are reasons to believe that crystal grow in this polarization leads to structures of better quality.…”
Section: Introductionmentioning
confidence: 99%