2018
DOI: 10.2494/photopolymer.31.289
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Reduction of Defect for Imprinted UV Curable Resin including Volatile Solvents using Gas Permeable Mold Derived from Cellulose

Abstract: Nanoimprint lithography has recently attracted much attention in microfabrication technology due to its two benefits of high resolving power and decreased production cost. It is promising for the next generation microfabrication technology. However, voids generated between the master mold and transferred replica mold are one of the problems for nanoimprint lithography. We have been developing gas permeable molds derived from cellulose to reduce defects caused from these voids. This study demonstrates the appli… Show more

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Cited by 4 publications
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References 17 publications
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