“…These are referred to as nano-electro-mechanical systems (NEMS). The nano-carbons (graphene [1,2], carbon nanotubes [3,4], and fullerene [5]), biomolecules (proteins [6], lipids [7,8], and nucleic acids [9,10]), and metal nanoparticles [11,12] are examples of nanoscale components that have been integrated into MEMS or microfluidic devices. They provide a new functionality, better sensitivity, and higher reliability.…”