Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

Misumi, Ichiko; Kizu, Ryosuke; Itoh, Hiroshi; Kumagai, Kazuhiro; Kobayashi, Kenkichiro; Sigehuzi, Tomoo

doi:10.1007/s41871-021-00119-1

Cited by 4 publications

(2 citation statements)

References 50 publications

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“…Nanometrology, the science of measurement at the nanoscale, has a crucial role in the manufacturing of nanomaterials and nanodevices with a high degree of accuracy and reliability [ 2 , 3 , 4 ]. A nano-object behaves differently from corresponding bulk material.…”

Section: Introductionmentioning

confidence: 99%

“…Trueness and precision guarantee the accuracy of the measurement. A Scanning Electron Microscope calibration involves 2D calibration gratings, containing lateral periodic patterns with a defined mean pitch or certified reference nanoparticles [ 3 , 7 ]. Many calibration gratings and a few reference nanoparticles (latex, silica and gold) are available on the market with a certified pitch/mean diameter for electron microscopy.…”

Section: Introductionmentioning

confidence: 99%

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Strategy for Ensuring the Metrological Traceability of Nanoparticle Size Measurements by SEM

Feltin,

Delvallée,

Crouzier

2024

Nanomaterials

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The concept of measurement traceability is crucial for ensuring the data reliability and the comparability of measurement results provided by different instruments and operators. In the field of nanoparticle metrology, determining the size of nanoparticles using electron microscopy-based techniques remains a real challenge. In laboratory settings, the establishment of traceability regarding the instrument calibration procedures, the assessment of uncertainties associated with instruments/operators/samples/environments, as well as the complexities related to electron–sample interactions, are often neglected. In this article, we describe the calibration procedure set up at the LNE (Laboratoire National de métrologie et d’Essais) and propose an evaluation method for determining the uncertainties in measuring nanoparticle size by SEM (Scanning Electron Microscopy). This study investigates the impact of the energy of the primary electrons (PEs) generated by the electron beam and accelerating voltage on the reliability of size measurements. The convolution between the signals coming from a nanoparticle and the substrate on which the particle is deposited induces edge effects that can have a negative impact on the measurement results. Finally, a diagram describing the various stages involved in establishing traceability for SEM measurements of nanoparticle size is proposed to facilitate the work of future operators.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Strategy for Ensuring the Metrological Traceability of Nanoparticle Size Measurements by SEM

Feltin,

Delvallée,

Crouzier

2024

Nanomaterials

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Indirect Measurement Methods for Quality and Process Control in Nanomanufacturing

Fan

Gao

2022

Nanomanuf Metrol

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Rapid advancement over the past decades in nanomanufacturing has led to the realization of a broad range of nanostructures such as nanoparticles, nanotubes, and nanowires. The unique mechanical, chemical, and electrical properties of these nanostructures have made them increasingly desired as key components in industrial and commercial applications. As the geometric dimension of nano-manufactured products is on the sub-micron to nanometer scale, different mechanisms and effects are involved in the nanomanufacturing process as compared to those for macro-scale manufacturing. Although direct measurement methods using atomic force microscopy and electron beam microscopy can determine the dimensions of the nano structure with high accuracy, these methods are not suited for online process control and quality assurance. In comparison, indirect measurement methods analyze in-process parameters as the basis for inferring the dimensional variations in the nano products, thereby enabling online feedback for process control and quality assurance. This paper provides a comprehensive review of relevant indirect measurement methods, starting with their respective working principles, and subsequently discussing their characteristics and applications in terms of two different approaches: data-based and physics-based methods. Relevant mathematical and physics models for each of the methods are summarized, together with the associated effect of key process parameters on the quality of the final product. Based on the comprehensive literature conducted, it was found that: (1) indirect measurement, especially the data-based method, plays a critical role when it comes to online process control and quality assurance in nanomanufacturing, because of the short processing time compared to the direct method, and (2) physics-based method is providing a way to optimize the process set up for desired geometrical dimensions.

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Sensitivity Improvements for Picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

Dong,

Yao,

Zhu

et al. 2024

Nanomanuf Metrol

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Picosecond ultrasonics, as a nondestructive and noncontact method, can be employed for nanoscale metallic film thickness measurements. The sensitivity of the system, which determines the measurement precision and practicability of this technique, is often limited by the weak intensity of the ultrasonic signal. To solve this problem, we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals, namely tungsten (W) and gold (Au). For thickness measurement in W films, theory and simulation show that optimizing the pump and probe laser wavelengths, which determine the intensity and shape of the ultrasonic signal, is critical to improving measurement sensitivity, while for Au film measurements, where acoustic-induced beam distortion is dominant, the signal intensity can be optimized by selecting an appropriate aperture size and sample position. The above approaches are validated in experiments. A dual-wavelength pump–probe system is constructed based on a passively mode-locked ytterbium-doped fiber laser. The smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic time-of-flight. Subnanometer measurement precision is achieved in a series of W and Au films with thicknesses of 43–750 nm. This work can be applied to various high-precision, noncontact measurements of metal film thickness in the semiconductor industry.

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Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

Cited by 4 publications

References 50 publications

Strategy for Ensuring the Metrological Traceability of Nanoparticle Size Measurements by SEM

Strategy for Ensuring the Metrological Traceability of Nanoparticle Size Measurements by SEM

Indirect Measurement Methods for Quality and Process Control in Nanomanufacturing

Sensitivity Improvements for Picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

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