Research on Micro-piezoresistive Accelerometer with Slotted Beams

Wang, Peng; Wang, Nan; Zhang, Changming; Yang, Fan; Zhao, Ruifeng

doi:10.18494/sam.2020.3079

Cited by 2 publications

(4 citation statements)

References 13 publications

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“…The fracture limit of CTSC increased by 180% compared with RTSC and only reduced by 10% compared with the CWS. The smaller spring constant and larger fracture limit demonstrated that the CTSC improves sensitivity and durability simultaneously, which has been insufficiently discussed in previous research. − …”

Section: Resultsmentioning

confidence: 89%

“…Over the past decades, there has been extensive research focused on improving sensitivity by optimizing the structure of a microcantilever. − These approaches employ a way of tailoring the stress in the local region where sensing elements are placed by structure modification, such as thinning, narrowing, and removing a bulk structure of microcantilevers. Despite superior sensitivity being exhibited by these modification methods, the fracture toughness and strength of the microcantilevers are significantly reduced.…”

Section: Introductionmentioning

confidence: 99%

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Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

et al. 2022

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Microcantilevers are one of the most essential sensitive elements for various mechanical sensors. Their sensing performance determines the index level of a series of sensors. To date, the long-standing trade-off between ultrasensitivity and long-term durability of microcantilevers still remains a challenge. In nature, scorpions can sense vibrations as low as 10 nm amplitude through their circular tip slits sensilla. Such slit sensilla embedded in the exoskeleton of walking legs endure the compressing and stretching of every movement without spontaneous fracture failures. Here, we focused on the structural design of the circular tip slits which concentrate stress effectively and disperse energy smoothly, with the result that the microcantilevers are ultrasensitive and durable simultaneously in a single element. We devised a reproducible circular tip slits cantilever with enhanced sensitivity and ultralow detection limits to monitor 7 nm amplitude vibrations. The sensor possessed excellent durability and remained highly consistent with the correlation coefficient of nearly 0.999 over 100 000 cycles. Furthermore, the circular tip slits cantilever could precisely sense diverse subtle mechanical signals and exhibited potential applications in monitoring respiratory patterns. The simple geometric design can be easily manufactured on various sensory materials for applications requiring ultrahigh sensitivity and long-time durability.

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Section: Resultsmentioning

confidence: 89%

Section: Introductionmentioning

confidence: 99%

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

et al. 2022

View full text Add to dashboard Cite

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“…A fully symmetrical 8-resistor piezoresistive arrangement is used, with a voltage output of 0 through the Wheatstone circuit. The transverse cross interference of the X direction and Y direction of the sensor is theoretically eliminated [5].…”

Section: Measurement Circuit Designmentioning

confidence: 99%

“…Transverse cross-sensitivity, also known as transverse cross-interference, is the ratio of the output caused by the acceleration input to the sensor in the non-sensitive direction to the output caused by the input in the sensitive direction for the same acceleration value, and is generally expressed as a percentage. In a complex acceleration environment, the lower the transverse cross-sensitivity of an acceleration sensor, the less the input acceleration in the non-measurement direction affects the sensor measurement accuracy, and the more accurate the measurement results in the measurement direction [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

A MEMS high g acceleration sensor simulation analysis

Yang

Wang²,

Chen³

et al. 2022

J. Phys.: Conf. Ser.

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The acceleration sensor with high g value is widely used in a variety of fields, including collision impact, aerospace, and defense security and thus is a key focus in the future. The sensor with a double-ended four-beam structure is investigated in this paper via finite element simulation analysis. The measurement sensitivity of the sensor can be improved by changing the position of the cantilever beam. Furthermore, transverse interference in the X-direction and Y-direction can be eliminated in theory through the layout of piezoresistors and the Wheatstone circuit. The simulation results show that the sensor's sensitivity is 2.6μV/g while its cross-sensitivity in the X-direction and Y-direction is 0%, indicating that the sensor's performance has been substantially improved.

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Research on Micro-piezoresistive Accelerometer with Slotted Beams

Cited by 2 publications

References 13 publications

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

A MEMS high g acceleration sensor simulation analysis

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