Research on the ductile-mode machining of monocrystalline silicon using polycrystalline diamond (PCD) tools

Bai, Jinxuan; Bai, Qingshun; Hu, Chao; He, Xin; Pei, Xudong

doi:10.1007/s00170-017-0966-x

Cited by 5 publications

(2 citation statements)

References 19 publications

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“…Therefore, PCD micro-milling technology has been thought as a promising manufacturing method and widely applied in industry for the fabrication of high-quality components with surface precision in micro-and nano-range. However, Bai et al [5] suggested that, in comparison to traditional processing way, the micro-milling mode has to suffer more severe machining conditions i.e. higher rotation speed and cutting temperature together with greater tribological interaction between tool-tip and workpiece substrate, which may adversely impact the performance for workpiece removal as well as finished surface and subsurface precision.…”

Section: Introductionmentioning

confidence: 99%

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Bai

Tong

2018

International Journal of Refractory Metals and Hard Materials

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The present study reports on experiments and numerical simulations carried out to determine the wear and cutting performance of different polycrystalline diamond (PCD) tools in micro-end milling titanium alloy. The influence of tool geometrical parameters on wear resistance and machined surface precision was discussed. Furthermore, subsurface microstructure alteration was employed as an important index for evaluating the cutting performance of PCD tools. A dislocation dynamics-based multiscale framework, which is capable of promulgating the potential mechanism of above alteration, was adopted to quantitatively predict the evolution behavior of subsurface damages layer during micro-cutting process. The results demonstrated that the tool nose, flank and rake wear were of major wear forms and inappropriate tool structural changes can further accelerate tool failure. A PCD tool with rake angle of 5°, clearance angle of 15°, tool cutting edge radius of 20 μm and PCD granularity of 10 μm has highest cutting performance among the tested tools. Using this cutting tool, a surface roughness of Ra = 75nm better than most previously reported value on titanium alloy Ti-6Al-4V was achieved. A mass of subsurface damages consisted of discrete dislocation configuration, parallel glide lines and persistent slip bands were found after machining. Particularly, small tool cutting edge radius, large rake as well as clearance angle contributed to reducing defects quantity and decreasing the thickness of subsurface damages layer.

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Section: Introductionmentioning

confidence: 99%

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Bai

Tong

2018

International Journal of Refractory Metals and Hard Materials

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“…Recently, silicon-based micro-electro-mechanical systems (MEMS) and nano-electro-mechanical system (NEMS) have been widely used in spaceflight, energy, life sciences, and medical fields due to their reliable and reproducible mechanical and electrical properties [ 1 , 2 ]. Ultra-precision machining technology is one of the most advanced methods for processing monocrystalline silicon devices [ 3 , 4 ].…”

Section: Introductionmentioning

confidence: 99%

Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

Bai

Tong

2017

Materials

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This article presents an experimental investigation on ductile-mode micro-milling of monocrystalline silicon using polycrystalline diamond (PCD) end mills. Experimental results indicate that the irregular fluctuation of cutting force always induces machined surface failure, even in ductile mode. The internal mechanism has not been investigated so far. The multiscale discrete dislocation plasticity framework was used to predict the dislocation structure and strain evolution under the discontinuous cutting process. The results showed that a mass of dislocations can be generated and affected in silicon crystal. The dislocation density, multiplication rate, and microstructure strongly depend on the milling conditions. In particular, transient impulse load can provide a great potential for material strength by forming dislocations entanglement structure. The continuous irregular cutting process can induce persistent slip bands (PSBs) in substrate surface, which would result in stress concentration and inhomogeneous deformation within grains.

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An investigation in the ultra-precision fly cutting of freeform surfaces on brittle materials with high machining efficiency and low tool wear

Sun

2018

Int J Adv Manuf Technol

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Research on the ductile-mode machining of monocrystalline silicon using polycrystalline diamond (PCD) tools

Cited by 5 publications

References 19 publications

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

An investigation in the ultra-precision fly cutting of freeform surfaces on brittle materials with high machining efficiency and low tool wear

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