2012
DOI: 10.4028/www.scientific.net/amr.542-543.891
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Research Progress of Materials and Fabrication Technologies of Microfluidic Chip

Abstract: We review the current typical materials of microfluidic chip and discuss the microfabrication technologies. A variety of materials exist for fabrication of microchip, including silicon, glass, quartz, polymers and paper. Early developments in microchip materials were focus on the silicon, glass and quartz by referring to the sophisticated microfabrication techniques from microelectronics field. Recently, the introductions of low-cost materials and easily fabricated techniques have offered more alternative ways… Show more

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Cited by 7 publications
(4 citation statements)
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“…With further application of micro total analysis systems (µTAS), a broad variety of materials are evolving and updating [10]. To date, MCE is achieved using mainly inorganic materials and organic materials, and more low-cost and simple fabrication methods are constantly emerging [11]. In the past two decades, various materials have been introduced in microfluidic chips, and choosing the right material is the first and most crucial step in microfluidic chip fabrication [12].…”
Section: Preparation Of Mcementioning
confidence: 99%
See 1 more Smart Citation
“…With further application of micro total analysis systems (µTAS), a broad variety of materials are evolving and updating [10]. To date, MCE is achieved using mainly inorganic materials and organic materials, and more low-cost and simple fabrication methods are constantly emerging [11]. In the past two decades, various materials have been introduced in microfluidic chips, and choosing the right material is the first and most crucial step in microfluidic chip fabrication [12].…”
Section: Preparation Of Mcementioning
confidence: 99%
“…Glass microchips have been used in chemical analysis for their excellent optical properties. At the same time, there exist negative charges on the glass surface, which support reproducible electroosmotic flow (EOF) [11]. Bai et al presented a facile approach for wettability-patterning of the microchannels of glass chips [20].…”
Section: Mce Of Inorganic Materialsmentioning
confidence: 99%
“…Particularly, polymer devices with microstructures are broadly used in many important fields such as precision energy and optical system, microfluidic chips, and drug delivery devices [ 3 , 4 , 5 , 6 ]. Therefore, there is a strong demand for miniature polymer devices and components with high form accuracy and surface quality [ 7 , 8 ]. PMMA has good comprehensive mechanical properties, and it is at the forefront of general-purpose plastics.…”
Section: Introductionmentioning
confidence: 99%
“…Microfluidic chip is generally employed to deal with the behavior, precise control, and manipulation of fluids, which are geometrically constrained to a small, typically sub-millimeter, and scale. Silicon, quartz, or glass is usually used to fabricate microfluidic chips by means of complicated and cleanroom-based multi-step processes such as lithography [3,4]. However, such conventional processing methods cannot satisfy the requirements of high efficiency and low cost [5,6].…”
Section: Introductionmentioning
confidence: 99%