Response time of thermal flow sensors

Sosna, C.; Walter, T.; Lang, Walter

doi:10.1016/j.proeng.2010.09.162

Cited by 8 publications

(9 citation statements)

References 1 publication

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“…From the inset of fig.4(d), the response time was estimated to be approximately 2s, which is comparable to that of other thermal flow sensors made on a less thermally conductive substrate [31]. This response of SiC on glass platform is quite slower than the response time of various MEMS thermal sensor platforms reported in the literature [51,52], where the response time is within the ms range, corresponding to a bandwidth of the kHz range. This is due to the large thermal mass of the glass substrate which supports the SiC heating and sensing elements.…”

Section: Flow Sensor Characterizationsupporting

confidence: 63%

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Balakrishnan

Dinh

Phan

et al. 2018

Sensors and Actuators A: Physical

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Thermoresistive properties of a Cubic Silicon carbide (3C-SiC) on glass sensor are studied. The negative temperature coefficient leads to an increasing signal with increasing flow velocity.  The relationship between the geometry of the SiC heater and the sensor performance is studied. A larger heater leads to a higher sensitivity.  Influence of flow direction on the sensor performance was studied. Downstream sensor is more sensitive.  The developed SiC thermal flow sensor combines the advantages of simplicity, low power consumption, high sensitivity and full dynamic range of air flow.

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Section: Flow Sensor Characterizationsupporting

confidence: 63%

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Balakrishnan

Dinh

Phan

et al. 2018

Sensors and Actuators A: Physical

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“…The performance depends on the heat transfer between the liquid and the sensing material which depends on the type of flow (lamellar or turbulent) and the velocity of flow. Gas flow induced by adiabatic expansion of gas by bursting a membrane placed at one end of a tube and acoustic waves have also been used to measure response time of the gas [76,77]. The response time of stagnant gas is higher than that of flowing fluid, e.g.…”

Section: Flow Sensorsmentioning

confidence: 99%

Thin Film Thermoelectric Materials for Sensor Applications: An Overview

Bali

Chetty

Mallik

2015

Thin Film Structures in Energy Applications

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The modern world depends completely on electricity, the demand for which is increasing day by day. However, carbon-based fuels for power generation and transportation being currently used, e.g., coal, petroleum, etc., are expected to ultimately deplete, due to which there is an urgent need for non-conventional energy sources. At the same time, a large (~60 %) amount of heat is wasted from these industries and vehicles, which will increase further with economic growth and industrialization. Other renewable sources have their own limitations and many are region-specific. Thermoelectric (TE) materials are a means of utilization of waste heat on a small scale by directly converting it into electricity. The generated voltage also finds application in several types of sensors. In addition, these materials can be used for cooling, which is equivalent to direct conversion of electricity into heat, without using any harmful chlorofluorocarbon (CFC) gases. This chapter is intended to give an overview of thin film thermoelectric materials with a focus on their application as different sensors.The chapter is divided into six sections. Section 7.1 introduces the phenomenon of thermoelectricity-Seebeck, Peltier, and Thomson effects, and the thermoelectric figure of merit (zT). Section 7.2 deals with the basics of transport properties, while in Sect. 7.3 the different strategies to improve zT are briefly summarized. Section 7.4 describes the need of going towards lower dimensions, i.e., the thin film state, for improvement of zT. Different fabrication methods are summarized in Sect. 7.5. Finally, in Sect. 7.6, application of thermoelectric thin films as different types of sensors is described.

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“…With the assumption of a simple RC-circuit, time delay of one through contact is approximately a few ns and can be neglected for our application. Measurements with thermal flow sensors under flow result to response times in a range of 0.5 ms to 1.8 ms [8].…”

Section: A Electrical Characterization Of Tsvmentioning

confidence: 99%

Miniaturized thermal flow sensors with through silicon vias for flip-chip packaging

et al. 2010

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We present the first miniaturized, high temperature stable thermal flow sensor with through silicon vias for electrical connection on the back of the silicon chip. The electrical and mechanical connections are done by standard flip-chip bonding to a printed circuit board which leads to a simpler packaging as compared to wire bonding. Moreover, the chip size could be further reduced without any loss of performance.

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Response time of thermal flow sensors

Cited by 8 publications

References 1 publication

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Thin Film Thermoelectric Materials for Sensor Applications: An Overview

Miniaturized thermal flow sensors with through silicon vias for flip-chip packaging

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