2010
DOI: 10.1007/s00542-010-1089-6
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Review of atomic MEMS: driving technologies and challenges

Abstract: Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

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Cited by 16 publications
(9 citation statements)
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“…Recent approaches for the storing as well as the delay of single photons stemming from semiconductor QDs were mainly based on hot atom vapor cells that can be easily utilized for free‐space applications . However, also the on‐chip integration of such vapor cells is currently under investigation …”
Section: Gaas‐based Photonic Integrated Circuitsmentioning
confidence: 99%
“…Recent approaches for the storing as well as the delay of single photons stemming from semiconductor QDs were mainly based on hot atom vapor cells that can be easily utilized for free‐space applications . However, also the on‐chip integration of such vapor cells is currently under investigation …”
Section: Gaas‐based Photonic Integrated Circuitsmentioning
confidence: 99%
“…The operational principles and the detailed description of CSAC have been widely shown in the literature relating to the subject and therefore will not be discussed here [3,6,32,33,34,35,36,37,38,39,40].…”
Section: Introductionmentioning
confidence: 99%
“…Atomic sensors, which are based on atomic spectroscopy and light-atom interaction, serve as precision measurement sensors in various applications [ 1 , 2 ]. Normally, atomic sensors are categorized as atomic clocks, magnetometers, gyroscopes, interferometers, and other types of sensors [ 3 ].…”
Section: Introductionmentioning
confidence: 99%