Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Pan, Jiong; Bai, Chenyu; Zheng, Qincheng; Xie, Huikai

doi:10.3390/mi14020374

Cited by 17 publications

(4 citation statements)

References 110 publications

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“…The use of silicon for the transducer has also facilitated the coupling with the microelectronic control circuit, also obviously made of silicon. The main gains related to the use of novel piezoelectric devices are (i) low levels of background noise; (ii) reduction in the power consumption; (iii) multifunctionality; and iv batch production [ 227 , 228 ]. Ultrasound-on-chip, the first to be cleared by the Food and Drug Administration for 13 indications, comprises a two-dimensional array of silicon-based microelectromechanical systems (MEMS) ultrasonic sensors directly integrated into complementary metal–oxide–semiconductor-based control and processing electronics which enable an inexpensive whole-body imaging probe [ 229 , 230 , 231 ].…”

Section: Frontier Technologies In Lung Cancer Clinical Managementmentioning

confidence: 99%

Smart Sensors and Microtechnologies in the Precision Medicine Approach against Lung Cancer

et al. 2023

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Background and rationale. The therapeutic interventions against lung cancer are currently based on a fully personalized approach to the disease with considerable improvement of patients’ outcome. Alongside continuous scientific progresses and research investments, massive technologic efforts, innovative challenges, and consolidated achievements together with research investments are at the bases of the engineering and manufacturing revolution that allows a significant gain in clinical setting. Aim and methods. The scope of this review is thus to focus, rather than on the biologic traits, on the analysis of the precision sensors and novel generation materials, as semiconductors, which are below the clinical development of personalized diagnosis and treatment. In this perspective, a careful revision and analysis of the state of the art of the literature and experimental knowledge is presented. Results. Novel materials are being used in the development of personalized diagnosis and treatment for lung cancer. Among them, semiconductors are used to analyze volatile cancer compounds and allow early disease diagnosis. Moreover, they can be used to generate MEMS which have found an application in advanced imaging techniques as well as in drug delivery devices. Conclusions. Overall, these issues represent critical issues only partially known and generally underestimated by the clinical community. These novel micro-technology-based biosensing devices, based on the use of molecules at atomic concentrations, are crucial for clinical innovation since they have allowed the recent significant advances in cancer biology deciphering as well as in disease detection and therapy. There is an urgent need to create a stronger dialogue between technologists, basic researchers, and clinicians to address all scientific and manufacturing efforts towards a real improvement in patients’ outcome. Here, great attention is focused on their application against lung cancer, from their exploitations in translational research to their application in diagnosis and treatment development, to ensure early diagnosis and better clinical outcomes.

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Section: Frontier Technologies In Lung Cancer Clinical Managementmentioning

confidence: 99%

Smart Sensors and Microtechnologies in the Precision Medicine Approach against Lung Cancer

et al. 2023

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“…4 Compared to most nanomedicines with multiple components and complex nanostructures, piezoelectric materials have simple and welldefined compositions and structures, as well as adjustable shapes, sizes, and piezoelectric catalytic activities. 5 Piezoelectric materials demonstrate high sensitivity, 6 reversibility, 7 low power consumption, 8 and mechanical stability 9 in mechanical, electronic, optical, acoustic, and catalytic performance, 10 and thus showed wide applications in various fields, including biomedicine.…”

Section: ■ Introductionmentioning

confidence: 99%

Bibliometric and Visualized Analysis of Piezoelectric Materials in Biomedical Application

Wang,

Wu,

Zhang

et al. 2024

ACS Appl. Electron. Mater.

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Piezoelectric materials have been extensively utilized in the field of biomedicine. Despite multiple studies reviewing the progress in biomedical piezoelectric materials, there is still a lack of research that provides an objective summary and analysis of research trends in this crucial field. Consequently, this study employs a range of bibliometric methods to comprehensively assess the development of piezoelectric material-related biomedical fields. The number of citations is a critical metric for gauging the scientific impact of an article within its field. This study aims to assess the application and potential of piezoelectric materials in the biomedical field through bibliometric analysis while providing scientific support for future research in this area.

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“…Among the broad range of PMUT application domains, two main categories stand out: ultrasonic air-coupled and ultrasonic fluid-coupled applications. The first domain involves applications such as telemetry, with the manufacture of dedicated electronic components [24,25] and gesture or movement recognition [26,27]. The second domain is mainly dedicated to medical applications, including ultrasound imaging and high-intensity therapeutic ultrasound capabilities [28,29].…”

Section: Introductionmentioning

confidence: 99%

Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

Goepfert,

Boulmé,

Levassort

et al. 2023

Micromachines

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A complete model was developed to simulate the behavior of a circular clamped axisymmetric fluid-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Combining Finite Difference and Boundary Element Matrix (FD-BEM), this model is based on the discretization of the partial differential equation used to translate the mechanical behavior of a PMUT. In the model, both the axial and the transverse displacements are preserved in the equation of motion and used to properly define the neutral line position. To introduce fluid coupling, a Green’s function dedicated to axisymmetric circular radiating sources is employed. The resolution of the behavioral equations is used to establish the equivalent electroacoustic circuit of a PMUT that preserves the average particular velocity, the mechanical power, and the acoustic power. Particular consideration is given to verifying the validity of certain assumptions that are usually made across various steps of previously reported analytical models. In this framework, the advantages of the membrane discretization performed in the FD-BEM model are highlighted through accurate simulations of the first vibration mode and especially the cutoff frequency that many other models do not predict. This high cutoff frequency corresponds to cases where the spatial average velocity of the plate is null and is of great importance for PMUT design because it defines the upper limit above which the device is considered to be mechanically blocked. These modeling results are compared with electrical and dynamic membrane displacement measurements of AlN-based (500 nm thick) PMUTs in air and fluid. The first resonance frequency confrontation showed a maximum relative error of 1.13% between the FD model and Finite Element Method (FEM). Moreover, the model perfectly predicts displacement amplitudes when PMUT vibrates in a fluid, with less than 5% relative error. Displacement amplitudes of 16 nm and 20 nm were measured for PMUT with 340 µm and 275 µm diameters, respectively. This complete PMUT model using the FD-BEM approach is shown to be very efficient in terms of computation time and accuracy.

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Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Cited by 17 publications

References 110 publications

Smart Sensors and Microtechnologies in the Precision Medicine Approach against Lung Cancer

Smart Sensors and Microtechnologies in the Precision Medicine Approach against Lung Cancer

Bibliometric and Visualized Analysis of Piezoelectric Materials in Biomedical Application

Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

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