Review of technologies for high-voltage integrated circuits

Abstract

High-Voltage power Integrated Circuits (HVICs) are widely used to realize high-efficiency power conversions (e.g., AC/DC conversion), gate drivers for power devices and LED lighting, and so on. The Bipolar-CMOS-DMOS (BCD) process is proposed to fabricate devices with bipolar, CMOS, and DMOS modes, and thereby realize the single-chip integration of HVICs. The basic integrated technologies of HVICs include High-Voltage (HV) integrated device technology, HV interconnection technology, and isolation technology. The HV integrated device is the core of HVICs. The basic requirements of the HV integrated device are high breakdown voltage, low specific on-resistance, and process compatibility with low-voltage circuits. The REduced SURFace field (RESURF) technology and junction termination technology are developed to optimize the surface field of integration power devices and breakdown voltage. Furthermore, the ENhanced DIelectric layer Field (ENDIF) and REduced BULk Field (REBULF) technologies are proposed to optimize bulk fields. The double/triple RESURF technologies are further developed, and the superjunction concept is introduced to integrated power devices and to reduce the specific on-resistance. This work presents a comprehensive review of these technologies, including the innovation technologies of the authors' group, such as ENDIF and REBULF, substrate termination technology prospective integrated technologies and HVICs in wide band gap semiconductor materials are also discussed.

Identifying important ports in maritime container shipping networks along the Maritime Silk Road

“…Yan et al (2017) used the fuzzy-TOPSIS method to evaluate the waterway congestion in the Yangtze River under dynamic risk conditions. Zhang et al (2018) used a TOPSIS method based on entropy weight to analyze 27 different gauges in different regions across the country Modular ports for military transport capacity assessment. Cao (2019) established a combination model based on data envelopment analysis (DEA) and TOPSIS method to calculate the comprehensive efficiency, pure technical efficiency, and scale efficiency of ports.…”