RF Magnetron Sputtering Growth of Epitaxial SrRuO₃ Films with High Conductivity

Abstract

SrRuO3 films were grown on (001)SrTiO3 single crystal substrates by rf magnetron sputtering under various total pressures, and their crystal structure, room temperature resistivity, and temperature dependency of resistivity were investigated. High-resolution X-ray diffraction (XRD) analysis revealed that the unit cell volume of these films decreased with increasing total pressure from 1.3 to 27 Pa and was almost constant above 27 Pa corresponding to that of bulk SrRuO3. SrRuO3 films deposited under a total pressure of 27 Pa showed the lowest room temperature resistivity, i.e., 250 µΩ·cm, almost the same as the reported one of the SrRuO3 single crystal. This film also showed a positive temperature dependency of resistivity with a temperature dependency change at about 150 K, which was also in good agreement with the reported one of the SrRuO3 single crystal.

Composition control and thickness dependence of {100}-oriented epitaxial BiCoO3–BiFeO3 films grown by metalorganic chemical vapor deposition

“…͑100͒SrTiO 3 substrates with an epitaxial SrRuO 3 layer for the bottom electrodes, ͑100͒ c SrRuO 3 ʈ ͑100͒SrTiO 3 , were also used to evaluate the electrical properties. 10 Varying the input gas flow rate of each source gas adjusted the film composition via the following equation:…”

Growth of Epitaxial Potassium Niobate Film on (100)SrRuO3/(100)SrTiO3 by Hydrothermal Method and their Electromechanical Properties

“…Epitaxial (100) c -oriented SrRuO 3 layers were grown on (100)SrTiO 3 substrates by sputtering methods and were used for the bottom electrodes, (100) c SrRrO 3 // (100)SrTiO 3 [10] . Epitaxial (100) c -oriented SrRuO 3 layers were grown on (100)SrTiO 3 substrates by sputtering methods and were used for the bottom electrodes, (100) c SrRrO 3 // (100)SrTiO 3 [10] .…”

Polarization-Induced Photovoltaic Effects in Nd-Doped BiFeO3Ferroelectric Thin Films

“…In this paper, the effect of Nd doping into BFO films on the ferroelectric and photovoltaic properties will be presented. For obtaining favorable properties of BFO films, among the various conductive oxide materials, the pseudo-cubic perovskite SrRuO 3 (SRO) with a low resistivity (single crystal: 280 μΩcm) [23][24][25] was employed as bottom electrodes.…”