Ring gyroscope sensitive element based on nanoporous alumina

Abstract

Purpose This paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performed. Design/methodology/approach The design of gyroscope represents a sensitive element on a glass substrate; in the center of a ring, there is a permanent magnet in a steel box. The sensitive element is made of profiled nanoporous anodic alumina consisting of an octagonal frame which is connected to a ring in the center with eight N-shaped spokes. The technology of the sensitive element fabrication involves the electrochemical formation of nanoporous anodic alumina substrate given the thickness and porosity and its chemical etching on the element topology. The basic parameters and the operation principle of the nanoporous alumina-sensitive element have been defined by finite element simulation. Findings It is shown that the resonance frequencies of the sensitive element change as functions of the alumina porosity. The main parameters of the nanoporous alumina-sensitive element have been compared with parameters of a silicon-sensitive element. Calculations have shown that the mechanical deformations of the von Mises are approximately lower by two times in the nanoporous alumina-sensitive element. Practical implications High-precision angular rate measurement will be achieved by reducing mechanical and electrical noises practically to zero through careful designing of a ring magnetoelectric gyroscope Originality/value The ring resonator made of nanoporous anodic alumina will allow to increase the threshold of sensitivity and stability of micromechanical gyroscope characteristics owing to the high precision of geometric dimensions, the stability of the elastic properties and the quality factor.

Spatially Ordered Matrix of Nanostructured Tin–Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing

“…The use of modified porous anodic alumina films as support material for forming continuous tin-tungsten oxide layers with high surface area will be of vast practical importance for the fabrication of new gas sensors having the higher sensing area and the higher surface-to-volume ratio. It is readily expected that the new sensors will have superior selectivity and sensitivity as compared to the traditional gas sensors in the literature [ 32 , 33 , 34 , 35 ]. Additionally, and importantly, the approach and technique developed here should be of interest for preparing anodic alumina matrixes and templates, on various types of substrates, for the direct deposition of pure metals and semiconductors for many other functional utilizations in the fields of modern micro- and nanoelectronics [ 32 , 33 , 34 , 35 ].…”

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

“…The paper considers various design options for sensors with different topologies of a meander-type heater, in which optimal heat exchange processes are ensured with low power consumption, and the main characteristics of thin-film sensors with such heaters manufactured by MEMS-silicon technology using nanostructured gas-sensitive thin films on anodic alumina membranes are studied [36][37][38].…”

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

“…The use of nanoporous AA as substrates with high mechanical properties [ 41 , 42 ] in the fabrication of gas sensors significantly reduces their energy losses during operation. As shown by theoretical calculations and experimental data, the energy consumption of the sensors decreases with increasing substrate porosity [ 28 , 29 ].…”