2002
DOI: 10.1016/s0039-6028(01)01545-x
|View full text |Cite
|
Sign up to set email alerts
|

Role of surface and interface science in chemical vapor deposition diamond technology

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
11
0

Year Published

2009
2009
2019
2019

Publication Types

Select...
4
2
1

Relationship

0
7

Authors

Journals

citations
Cited by 34 publications
(11 citation statements)
references
References 80 publications
0
11
0
Order By: Relevance
“…From the Arrhenius plot, i.e., log(J) versus 1/T (Fig. 3b), the activation energy for undoped diamond layer was estimated using formula (2). The obtained activation energy equal to 0.064 eV is rather small and indicates on shallow energy states.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…From the Arrhenius plot, i.e., log(J) versus 1/T (Fig. 3b), the activation energy for undoped diamond layer was estimated using formula (2). The obtained activation energy equal to 0.064 eV is rather small and indicates on shallow energy states.…”
Section: Methodsmentioning
confidence: 99%
“…Most of the physical properties of CVD diamond layers are very similar to that of natural diamonds and can find applications in many fields of science and technology such as a new material and can even replace the conventional materials used so far [1][2][3]. As it is well known, ''as-grown'' CVD diamond films are always hydrogen terminated, which generates, in both undoped and B-doped, diamond layers p-type surface conductivity [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Scanning probe microscopy (SPM), low-energy electron diffraction (LEED), Fourier transform-infrared spectroscopy (FT-IR), and electron energy loss spectroscopy (EELS) provides physical and chemical information on surfaces at the atomic level, and are powerful tools for the study of diamond CVD growth. Results from such techniques reveal that as-grown diamond {100} and {111} surfaces have 2 × 1:H reconstructed structures with carbon dimer rows and 1 × 1:H structures, respectively [96][97][98][99][100][101][102][103][104][105][106][107][108]. Nevertheless, at present, the mechanism of diamond growth by PECVD is still not well-understood because of the difficulty of in situ observations.…”
Section: Carbonmentioning
confidence: 99%
“…Diamond is a material that shows properties such as high stiffness, thermal conductivity, optical transparency range, physicochemical stability, erosion resistance, and inertness [34]. The transparency is covered over a broad range from the far-ultraviolet (UV) to the far-infrared (IR).…”
Section: Derivatized Diamondmentioning
confidence: 99%