Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries

Etula, Jarkko; Lahtinen, Katja; Iyer, Ajai; Arstila, Kai; Sajavaara, Timo; Kallio, Tanja; Helmersson, Ulf

doi:10.1002/adfm.201904306

Cited by 8 publications

(4 citation statements)

References 62 publications

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“…As shown in Fig. 3a, b, both samples display a granular surface with voided boundaries resulting from particle agglomeration due to the low-temperature substrates and long target-substrate distance, which causes adatoms to have low kinetic energy when reaching the substrate surface according to the Thornton structure zone model [21,[41][42][43]. The microsized surface roughness increases the specific surface area in contact with the electrolyte, thus promoting the lithium-ion transport.…”

Section: Resultsmentioning

confidence: 99%

Ultrahigh-power iron oxysulfide thin films for microbatteries

Wang

Cheng

et al. 2022

Sci. China Mater.

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Areal power density is one of the core indicators determining how large areas a microbattery need to occupy when integrated directly with microelectronic devices for the Internet of Things. Unfortunately, the low power density of microbatteries hinders their applications, because microelectronic devices only provide finite areas for integration. Herein, we show that sputtered iron oxysulfide (FeO x S y ) thin films subjected to in situ plasma pretreatment display ultrahigh power density. This in situ plasma pretreatment can be regarded as a universal interface optimization strategy for suppressing mechanical degradation upon extended cycling. The synergistic effects of high structural integrity (robust interfacial adhesiveness and stress-relieving islands), perfect electrochemical reversibility, and near-surface charge exchanges (pseudocapacitive lithium storage mechanism) result in extremely high power density and stable cycling performance. The pretreated FeO x S y thin films can output an areal power density as high as 14.6 mW cm −2 and a considerable volumetric energy density of 291 μW h cm −2 μm −1 . Such a highpower density constitutes a new state-of-the-art level for sputtered thin-film materials with comparative areal capacity. This work provides an efficient and simple pretreatment method for achieving ultrahigh-power and stable thin-film electrodes for microbatteries.

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Section: Resultsmentioning

confidence: 99%

Ultrahigh-power iron oxysulfide thin films for microbatteries

Wang

Cheng

et al. 2022

Sci. China Mater.

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“…In the manufacturing process of 3D microbatteries, the key step would be to fabricate the 3D architectures of electrodes, such as vertically aligned nanowires, nanorods, nanoporous monoliths, and multi-layered stacks. 8 In the past two decades, substantially advanced techniques have been utilized to build individual 3D electrodes or microbatteries, 9 such as wet or dry etching, [10][11][12] photopatterning, 13,14 sputtering, [15][16][17] electrodeposition, [18][19][20][21] chemical vapor deposition (CVD), 22,23 atomic layer deposition (ALD), 24,25 physical vapor deposition (PVD), 26 and other combinations thereof. Although some of these relatively new approaches have demonstrated potential exciting paths, the commercialization of microbatteries is however still in the early and formative stage.…”

Section: Context and Scalementioning

confidence: 99%

Design and Manufacture of 3D-Printed Batteries

Lyu

Koh

Li³

et al. 2021

Joule

201

133

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“…The other main fabrication methods is deposition [37], including magnetron sputtering [54,55], electron beam evaporation [56,57], chemical vapor deposition (CVD) [58,59], physical vapor deposition (PVD) [58,60], electrodeposition (ED) [61][62][63], sol-gel deposition [64], PLD [65][66][67], ESD [68,69], etc. Among them, atomic layer deposition (ALD) is a typical CVD [70,71].…”

Section: Fabrication Of µLibsmentioning

confidence: 99%

Advances in micro lithium-ion batteries for on-chip and wearable applications

Hu¹,

Wang²

2021

J. Micromech. Microeng.

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Miniature power sources have gained widespread attention and accelerated progress with portable, wearable, and integrated electronic technologies. Micro lithium-ion batteries (μLIBs) featured small size, lightweight, high capacity, and long cycle life, which also offer stability, safety, and compatibility with microfabrication, make them the ideal choice for energy storage. Researchers have engaged in the performance optimization and application expansion of μLIBs, especially in the on-chip μLIBs with compatible integration for microdevices and flexible μLIBs for wearable applications. This paper reviews the working principles, performance metrics, and design methodologies of μLIBs, highlighting the advantages of the architecture design. Typical materials and fabrication methods are introduced, and their effects on the device performance and system integration are analyzed. The developments of μLIBs are summarized from the perspective of 3D architecture design to the on-chip and wearable applications. At last, the challenges and the prospects that inspire further research and development of μLIBs are concluded.

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Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries

Cited by 8 publications

References 62 publications

Ultrahigh-power iron oxysulfide thin films for microbatteries

Ultrahigh-power iron oxysulfide thin films for microbatteries

Design and Manufacture of 3D-Printed Batteries

Advances in micro lithium-ion batteries for on-chip and wearable applications

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