“…Thus, large 4π M s is necessary for both higher permeability and higher resonance frequency. CoFe alloy, which is one of the magnetic materials with largest saturation magnetization, is widely investigated in magnetic thin films 20 21 22 23 , Among these works, the Ru/FeCoB double layered film also indicates that large anisotropy can be induced in FeCoB layer 24 , In FeCoB thin films, the element B was selected as dopant to reduce the magneto-crystalline anisotropy, then, the in-plane uniaxial anisotropy of the films can be induced more easily 25 , In this work, we choose Co 69.0 Fe 27.8 B 3.2 (CFB) as the composition of the magnetic thin films, and combine with the oblique deposition technique to obtain such magnetic thin films with not only ultra-high resonance frequency but also tunable resonance frequency in an ultra-large range.…”