2011
DOI: 10.1109/led.2011.2157075
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Scalable High-Performance Phase-Change Memory Employing CVD GeBiTe

Abstract: We first present chemical-vapor-deposited GeBiTe (CVD GBT) in a confined cell for high-performance phase-change random access memory (PRAM). Due to the fast crystallization of GBT, we were able to reduce the speed to less than 26 ns while maintaining endurance characteristics up to 10 9 cycles. Our results indicate that the scalable PRAM device enabling the use of PRAM in dynamic RAM and storage class memory applications can be realized using CVD GBT.

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Cited by 33 publications
(17 citation statements)
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“…The emerging memory technologies include various types of memristors. In this section, four types of memristors are discussed: resistive switching, [11][12][13][14][15] phase-change, [16][17][18][19] spintronics, [20][21][22] and ferroelectric. [23][24][25] 2.1.…”
Section: Memristorsmentioning
confidence: 99%
“…The emerging memory technologies include various types of memristors. In this section, four types of memristors are discussed: resistive switching, [11][12][13][14][15] phase-change, [16][17][18][19] spintronics, [20][21][22] and ferroelectric. [23][24][25] 2.1.…”
Section: Memristorsmentioning
confidence: 99%
“…Bismuth is one of the dopants in GeTe that has been studied 18 and which has been shown to improve the crystallization speed. 19 Bi has a covalent radius of ∼148 pm, which is significantly larger than that of Ge (∼120 pm) or Te (∼138 pm). Because Bi is known to substitute in Ge sites, 20,21 it creates a size mismatch of >20%, resulting in largescale local atomic disorder.…”
mentioning
confidence: 90%
“…The size mismatch would push the ions off-center and create stress fields around the dopants, which can also induce other crystallographic defects in the system. , An ideal dopant would be one which induces maximum possible atomic disorder while not negatively affecting other PCM properties. Bismuth is one of the dopants in GeTe that has been studied and which has been shown to improve the crystallization speed . Bi has a covalent radius of ∼148 pm, which is significantly larger than that of Ge (∼120 pm) or Te (∼138 pm).…”
mentioning
confidence: 99%
“…While phase transition processes are well understood and some PCM chips have been manufactured successfully [21][22][23][24][25], SET speed has always been an issue for the realization of future fast speed PCM to meet DRAM like applications. Many efforts have been made to realize high speed of PCM such as the confined-cell, the new chemical vapor deposition technology and new operation method [26][27][28][29][30]. These studies mainly focus on single cell and microstructure characteristic, methods for improving chip level operation speed have not been well studied for embedded application.…”
Section: Introductionmentioning
confidence: 99%