Scanning tunneling microscopy based lithography employing amorphous hydrogenated carbon as a high resolution resist mask

Kragler, K.; Günther, E.; Leuschner, Rainer; Falk, G.; Hammerschmidt, A.; Seggern, Heinz von; Saemann‐Ischenko, G.

doi:10.1063/1.114995

Cited by 25 publications

(11 citation statements)

References 3 publications

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“…Most of these techniques take advantage of the spatial resolution of the electronic emission from a tip to locally expose ultrathin electron resists [367][368][369][370], such as self-assembled monolayers [371,372] or Langmuir-Blodgett films [373], or to directly modify the structure of the superficial layer [374][375][376][377], such as the oxygenation of hydrogenated silicon [378,379]. A few methods based on mechanically engraving a soft layer with the sharp atomic microscope tip have also been proposed [380].…”

Section: Introductionmentioning

confidence: 99%

Laser Application of Polymers

Lippert

2004

Polymers and Light

150

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Laser ablation of polymers has been studied with designed materials to evaluate the mechanism of ablation and the role of photochemically active groups on the ablation process, and to test possible applications of laser ablation and designed polymers. The incorporation of photochemically active groups lowers the threshold of ablation and allows high-quality structuring without contamination and modification of the remaining surface. The decomposition of the active chromophore takes place during the excitation pulse of the laser and gaseous products are ejected with supersonic velocity. Time-of-flight mass spectrometry reveals that a metastable species is among the products, suggesting that excited electronic states are involved in the ablation process. Experiments with a reference material, i.e., polyimide, for which a photothermal ablation mechanism has been suggested, exhibited pronounced differences. These results strongly suggest that, in case of designed polymers which contain photochemically active groups, a photochemical part in the ablation mechanism cannot be neglected. Various potential applications for laser ablation and the special photopolymers were evaluated and it became clear that the potential of laser ablation and specially designed material is in the field of microstructuring. Laser ablation can be used to fabricate three-dimensional elements, e.g., microoptical elements.Keywords Laser ablation · Ablation mechanism · Photopolymers · Polyimide · Spectroscopy This was not always true, of course. For many years, the laser was viewed as "an answer in search of a question". That is, it was seen as an elegant device, but one with no real useful application outside of fundamental scientific research. In the last two to three decades however, numerous laser applications have moved from the laboratory to the industrial workplace or the commercial market. Lasers are unique energy sources characterized by their spectral purity, spatial and temporal coherence, and high average peak intensity. Each of these characteristics has led to applications that take advantage of these qualities: -Spatial coherence: e.g., remote sensing, range finding and many holographic techniques. -Spectral purity: e.g., atmospheric monitoring based on high-resolution spectroscopies. -and of course the many other applications in communication and storage, e.g., CDs.All of these high-tech applications have come to define everyday life in the late twentieth century. One property of lasers, however, that of high intensity, did not immediately lead to "delicate" applications but rather to those requiring "brute force". That is, the laser was used in applications for removing material or heating. The first realistic applications involved cutting, drilling, and welding, and the laser was little more advanced than a saw, a drill, or a torch. In a humorous vein A.L. Schawlow proposed and demonstrated the first "laser eraser" in 1965 [4], using the different absorptivities of paper and ink to remove the ink without damaging the und...

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Section: Introductionmentioning

confidence: 99%

Laser Application of Polymers

Lippert

2004

Polymers and Light

150

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“…AFM studies on these carbon films suggest that they may be useful as smooth coatings or etch masks for nanometer patterning with intrinsic roughness smaller than 0.1 m. 26,27 Mass spectroscopy and optical emission spectroscopy studies indicated that significant concentrations of unsaturated hydrocarbon species ͑e.g., C 2 H 4 , C 3 H 4 , C 4 H 4 , and C 6 H 5 ͒ and hydrogen are formed.…”

Section: Discussionmentioning

confidence: 99%

Amorphous hydrogenated carbon film formation from benzene by electron cyclotron resonance chemical vapor deposition

Chen

Y²,

Hess

et al. 2000

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inInfluence of radio frequency power on thermal diffusivity of plasma enhanced chemical vapor deposition-grown hydrogenated amorphous carbon thin-films Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition Hydrogenated amorphous silicon carbide deposition using electron cyclotron resonance chemical vapor deposition under high microwave power and strong hydrogen dilution Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition Amorphous hydrogenated carbon thin films have been deposited from benzene vapor in an electron cyclotron resonance plasma-enhanced chemical vapor deposition reactor. The effects of gas flow rate, pressure, and microwave power on deposition rates, chemical structure and composition, and on film density were investigated. Plasma enhanced dissociation and ionization reactions were monitored by mass spectrometry and by optical emission spectroscopy. Dissociation products included a variety of unsaturated hydrocarbon species ͑primarily ethylene͒ and hydrogen. Deposited films were characterized by Fourier transform infrared spectroscopy, Raman spectroscopy, and fluorescence spectroscopy. Films displayed a condensed, aromatic, hydrocarbon-like structure, albeit without extensive conjugation. Possible reaction sequences leading to the observed film structures have been proposed.

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“…8) Fine lithography is possible using nanotube tips which have a high aspect ratio and small radius of curvature at the tip end. The polysilanes are different from the resist films examined so far such as SAL-601-ER7, 3) SAL-601, 4) poly(methylmethacrylane), 5) Si-CARL, 6) and siloxene 7) which are patterned by exposure to electrons followed by liquid developing.…”

Section: Introductionmentioning

confidence: 86%

“…[2][3][4][5][6][7] The advantages of the SPM lithography technique are the higher resolution and absence of radiation damage in the substrate to be patterned.…”

Section: Introductionmentioning

confidence: 99%

Direct Nanolithography of Organic Polysilane Films Using Carbon Nanotube Tips

Okazaki

Kishida

Akita

et al. 2000

Jpn. J. Appl. Phys.

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Nanolithography of polysilane films is performed by means of a tapping-mode-scanning probe microscope (SPM) equipped with a carbon nanotube tip. The tapping mode enables us to perform finer lithography than that by the contact mode. Electrons injected from the tip directly groove the polysilane film. A constant current operation is more stable in the tapping-mode lithography than a constant bias voltage operation. The mechanism of direct lithography is discussed on the basis of the model that the excess electrons in the Si backbone break Si-Si bonds. Fig. 6. Illustration explaining the mechanism of lithography in polysilane films. The injection of excess electrons into the Si backbone breaks Si-Si bonds to produce small fragments which are volatile. Si Si

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Scanning tunneling microscopy based lithography employing amorphous hydrogenated carbon as a high resolution resist mask

Cited by 25 publications

References 3 publications

Laser Application of Polymers

Laser Application of Polymers

Amorphous hydrogenated carbon film formation from benzene by electron cyclotron resonance chemical vapor deposition

Direct Nanolithography of Organic Polysilane Films Using Carbon Nanotube Tips

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