Scatterometry of honed surfaces

The Diagnostics of Abrasive Tools After Internal Cylindrical Grinding of Hard-to-Cut Materials by Means of a Laser Technique Using Imaging and Analysis of Scattered Light

“…The most dynamically developed for many years are the following methods: reflectometry [14], total integrated scattering (TIS) [15], angle-resolved scattering/differential scattering (ARS/DS) [16] and optical Fourier transform (OFT) [17]. These methods often use laser radiation (visible light or infrared ranges from 0.75 to 15 µm) and are thus defined by one general term-laser scatterometry [18][19][20].…”

Features of Electromagnetic Waves Scattering by Surface Fractal Structures

“…Thus, expression (6) gives the decision of a problem about finding a field scattering by a fractal surface , within the limits of Kirchhoff method.…”

“…Hence a noncontact and more speed optical method would be attractive. Different optical noncontact methods for measuring surface roughness have been developed mainly based on reflected light detection, focus error detection, laser scattering, speckle and the interference method [4][5][6][7][8][9][10]. Some of these have good resolutions and are being applied in some sectors where mechanical measuring methods previously enjoyed clear predominance.…”

Non-Gaussian scattering of light applied to investigation of ruffled surface of liquid

“…Optical methods are non-contact, what is important in many applications. Optical scatterometers are commercially available, and are standardized [5,6,7] . They are applied mainly for polished surface inspection.…”