Thermoelectric technology has been a focus of many scientists because of its ability to generate voltage from a temperature gradient or vice versa. The generation of voltage from a temperature gradient is due to the Seebeck effect. This effect has been utilized to measure temperatures of a certain object in thermocouple applications. The sensitivity of thermocouples can be described by how fast and how large such voltage generation occurs from a minimal temperature change. Such a parameter can be derived by plotting voltage versus temperature data. The slope of this plot is a Seebeck coefficient. Thus, thermocouples with very large Seebeck coefficients are critical in applications that require very sensitive and accurate measurements of temperature. For this reason, thermoelectric generator (TEG) modules that are typically fabricated to have large Seebeck coefficients can be beneficial. In this experiment, we fabricated thinfilm TEG modules based on cobalt-antimonide (Co-Sb) and zinc-antimonide (Zn-Sb) thermoelectric materials for a possible temperature sensor. They showed a reasonably high Seebeck coefficient in a temperature range between 50 and 200 °C, and also good reliability in cyclic temperature measurements, demonstrating their future benefits as thermocouples.