Selective Ablation of Thin Films by Ultrashort Laser Pulses

Xiao, Shuzhang; Schöps, Benjamin; Ostendorf, Andreas

doi:10.1016/j.phpro.2012.10.078

Cited by 18 publications

(16 citation statements)

References 20 publications

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“…Para realizar a ablação seletiva sem provocar estes efeitos negativos, uma possibilidade é a utilização de lasers de pulsos ultracurtos, com larguras temporais da ordem de poucas dezenas ou centenas de femtossegundos (1fs = 10 -15 s). Como a duração temporal destes pulsos é menor que o tempo de interação elétron-fonon, grande parte do processo de ablação ocorre antes que haja transferência significativa de calor para a rede cristalina, e o material é ejetado por repulsão coulombiana, sem que haja acúmulo significativo de calor na região de interação [5,6]. Para determinar o limiar de ablação de um material por lasers de pulsos ultracurtos, ou seja, determinar a quantidade mínima de energia capaz de causar algum dano ao material, utilizou-se a técnica D-Scan, desenvolvida no laboratório de lasers de altíssima intensidade do CLA-IPEN [7], que consiste na varredura da amostra nos sentidos transversal e longitudinal, simultaneamente, conforme mostra a Figura 1(a), indo de um ponto anterior à cintura do laser até um ponto posterior.…”

Section: Introductionunclassified

“…[5] A simples utilização de pulsos ultracurtos, contudo, não garante a interação não térmica do processo, e somente a utilização de parâmetros adequados do pulso laser podem levar a um processo com mínimo acúmulo de calor. Assim, há a necessidade de se encontrar os parâmetros de processo que levem a um acúmulo mínimo de calor na região de interação com o pulso laser, e, ao mesmo tempo, garantam a remoção completa do filme depositado sobre a pastilha de usinagem.…”

Section: Introductionunclassified

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Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Oliveira¹,

Samad²,

Vieira³

et al. 2017

Anais Do Congresso Anual Da ABM

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ResumoDevido à possibilidade de se remover quantidades muito pequenas de material de cada vez, a ablação seletiva por laser tem se mostrado um método muito eficaz para remoção de finas camadas de materiais depositados sobre um substrato. Neste trabalho, um laser de femtossegundo foi utilizado para remoção de um filme fino de nitreto de titânio (TiN) depositado sobre um substrato de carboneto de tungstênio (WC), configuração comum em pastilhas de usinagem mecânica, objetivando fornecer um método eficiente para tal processo. Os limiares de ablação do filme e do substrato foram determinados, evidenciando a problemática do trabalho, remover um filme com limiar maior que o substrato. Um sistema de controle de espectrometria de emissão atômica induzida por laser (LIBS) foi testada, com a intenção de controlar em tempo real, a espécie do material ablacionado, mostrando-se muito eficiente. Os parâmetros do laser bem como da varredura de usinagem ainda estão sendo testados para definir a viabilidade do processo. Palavras-chave: Laser de femtosegundo; Ablação seletiva; Microusinagem; Filmes finos. SELECTIVE ABLATION OF A THIN TIN FILM DEPOSITED ON A TUNGSTEN SUBSTRATE AbstractDue to the ability to remove very small amounts of material at a time, the selective laser ablation has proven a very effective method for removing thin layers of material deposited on a substrate. In this work, a laser femtosecond was used to remove a thin film of titanium nitride (TiN) deposited on a tungsten carbide substrate (WC), common configuration for mechanical machining chips, aiming to provide an efficient method for this process. The film and substrate ablation threshold were determined, highlighting the problems of work, remove a film with threshold higher than the substrate. An laser induced atomic emission spectrometer control system (LIBS) has been tested with the intention of controlling in real time the species of material ablationed, proved to be very efficient. The laser and machining parameters are still being tested to determine the availability of the process.

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Section: Introductionunclassified

Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Oliveira¹,

Samad²,

Vieira³

et al. 2017

Anais Do Congresso Anual Da ABM

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“…Thus, it determines the HAZ. Sometimes thermal penetration depth is also defined as a combination of optical penetration depth and thermal diffusion length [53]. The thermal diffusion length is given as…”

Section: Penetration Depthmentioning

confidence: 99%

“…In the case of opt l << th l (typically for metals), the thermal penetration depth is dominant over the effective penetration depth. Temperature at the surface can be calculated as [53]:…”

Section: Penetration Depthmentioning

confidence: 99%

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Femtosecond laser interaction with polystyrene and its wettability characteristics

Wang¹

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Ultrashort pulsed laser polymer processing has attracted much interest recently.Ultrashort pulsed laser has an advantage in the processing of transparent and dielectric materials due to its high intensity and short pulse duration. Many investigations have been conducted in this area. However, there are still important issues yet to be clarified and resolved. These include a rigorous and quantitative investigation on the nonlinear absorption of laser power by the irradiated substrate, the associated thermal effects and heat conduction on the transparent materials (e.g. a transparent polymer). In addition, it is known that a short pulsed laser could modify the surface wettability of a polymer, but the linkage of the modification to nonlinear absorption has never been correlated. Polystyrene (PS) is a versatile polymer with many applications; many of these applications can take advantage of the different wettability if available. As PS is transparent to the wavelength of femtosecond laser employed for this investigation, PS is a natural choice for the current investigation.In the current study, the nonlinear absorption behavior of thick transparent PS samples were theoretically analyzed and experimentally investigated by applying the z scan technique. The thick PS sample was treated as a stack of thin samples and the nonlinear absorption behavior at different laser powers were investigated. The nonlinear absorption coefficient of PS was quantified to be 0.000695 m/W. The absorbed laser energy by the PS substrate will subsequently be converted to heat energy, and be conducted away. This femtosecond laser induced thermal effects

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Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂

Becher,

Ullrich,

Jagosz

et al. 2024

Adv Materials Inter

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In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐layer deposited MoS2 layers are studied experimentally. The process parameters (laser fluence and the pulse overlap) corresponding to formation of low‐ and high‐spatial frequency LIPSS as well as ablation and modification of the layers are identified for different pulse durations in the range from 0.2 to 10 ps. The role of the temperature accumulation is evaluated by changing the repetition rate from 0.2 to 2 MHz. The negative accumulation effect, i.e., the ablation of the layers becomes more difficult at higher laser pulse overlaps, is also observed. A simple model explaining the transition between different types of the LIPSS and the decrease of the ablation efficiency with the pulse overlap is suggested.

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Selective Ablation of Thin Films by Ultrashort Laser Pulses

Cited by 18 publications

References 20 publications

Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Femtosecond laser interaction with polystyrene and its wettability characteristics

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂

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Selective Ablation of Thin Films by Ultrashort Laser Pulses

Cited by 18 publications

References 20 publications

Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Ablação Seletiva De Filme Fino De Tin Depositado Sobre Um Substrato De Wc

Femtosecond laser interaction with polystyrene and its wettability characteristics

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2

Contact Info

Product

Resources

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Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂