Ceramics International
 2023
DOI: 10.1016/j.ceramint.2023.08.101
|View full text |Cite
|
Sign up to set email alerts
|

Selective electrochemical mechanical polishing of 4H–SiC surface employing porous material impregnated with electrolyte

Xiaozhe Yang
1
,
Xu Yang
2
,
Zhuangde Jiang
3
Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2024
2024
2025
2025

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
references
References 24 publications
0
0
0
Order By: Relevance

Sustainable Electrochemical Mechanical Polishing (ECMP) for 4H-SiC wafer using chemical-free polishing slurry with hydrocarbon-based solid polymer electrolyte

Inada,
Takizawa,
Adachi
et al. 2024
Applied Surface Science
6
0
0
0
View full textAdd to dashboardCite

Sustainable Electrochemical Mechanical Polishing (ECMP) for 4H-SiC wafer using chemical-free polishing slurry with hydrocarbon-based solid polymer electrolyte

Inada,
Takizawa,
Adachi
et al. 2024
Applied Surface Science
6
0
0
0
View full textAdd to dashboardCite

Effect of UV-illumination on electrochemical anodic oxidation of SiC

Wei,
Wang,
Liang
et al. 2025
Journal of Materials Processing Technology
0
0
0
0
View full textAdd to dashboardCite

Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron

Wu,
Huang,
Wu
et al. 2024
Tribology International
3
0
0
0
View full textAdd to dashboardCite
scite logo

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Product
Browser ExtensionAssistant by sciteCitation Statement SearchReference CheckVisualizationsDashboardsExplore JournalsExplore OrganizationsExplore FundersEmbedding BadgeEmbedding Citation SearchPricing
Resources
BlogHelp & FAQAccessibility StatementAPI TermsFor Universities & GovernmentsFor ResearchersFor PublishersFor Corporate, Pharma & EnterpriseAuthor MarketingBecome an AffiliateGet an organization trial or quotescite Data & Services
About
News & PressCareersRead our PaperCoverage

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

BlogTerms and ConditionsAPI TermsPrivacy PolicyContactCookie PreferencesDo Not Sell or Share My Personal Information

Copyright © 2024 scite LLC. All rights reserved.

Made with 💙 for researchers

Part of the Research Solutions Family.