Sensitivity Features of Thin Film Plate Acoustic Wave Resonators

Arapan, Lilia; Anderås, Emil; Katardjiev, Ilia; Yantchev, Ventsislav

doi:10.1109/jsen.2011.2158094

Cited by 15 publications

(10 citation statements)

References 12 publications

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“…Besides these, SAW devices are also advantageous due to the stability of fundamental frequency and miniaturized size. Different types of acoustic waves have been utilized for the fabrication of devices based on their applications such as Rayleigh waves in acoustic wave resonators for gas sensing, [1][2][3][4] Love waves for biosensing in liquid media and seismology, [5,6] Lamb waves for biosensing, damage detection, and environmental monitoring, [7][8][9][10] acoustic plate modes (APM) for biosensing applications. [11] SAW devices fabricated on a membrane with a thickness less than or equal to the acoustic wavelength are known as Lamb wave devices.…”

Section: Introductionmentioning

confidence: 99%

Simulation and Fabrication of Higher‐Mode Lamb Wave Acoustic Devices for Sensing Applications

Bharati

Rana

Gupta

et al. 2023

Physica Status Solidi (a)

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Recently Lamb wave devices have originated as an alternate acoustic device for high‐frequency wireless sensing applications. Their potential for sensing devices, including biomedical diagnostics and environmental monitoring as a wireless and passive device, calls for further analysis of the device with higher sensitivity. ZnO‐based sensor has always been of research interest due to its biocompatibility, sensing abilities, and yet cost‐effectivity. A Lamb wave device based on ZnO/SiO2/Si membrane has been theoretically simulated using finite element analysis method (FEM) to study the higher modes, as higher working frequency leads to higher sensitivity of the device toward sensing applications. Optimized properties are identified and utilized for the fabrication of Lamb wave devices. It is observed that for optimized parameters of ZnO/SiO2/Si Lamb device, higher antisymmetric modes are not only advantageous for high sensitivity applications but also more stable within the given operating conditions. Experimentally obtained results indicate close matching with theoretical results.

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Section: Introductionmentioning

confidence: 99%

Simulation and Fabrication of Higher‐Mode Lamb Wave Acoustic Devices for Sensing Applications

Bharati

Rana

Gupta

et al. 2023

Physica Status Solidi (a)

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“…16 Because the longitudinal wave has rapid attenuation and the shear wave has almost no attenuation in liquid, 17,18 TSM FBAR in shear wave mode is suitable to sense pressure in liquid environment. 19 At present, there are two kinds of TSM FBARs, which are lateral field excitation (LFE) and thickness field excitation (TFE). 20 When the two electrodes of TFE FBAR are on both sides of the piezoelectric film, the electric field is exerted along thickness direction of piezoelectric film.…”

Section: Introductionmentioning

confidence: 99%

A film bulk acoustic resonator pressure sensor based on lateral field excitation

Geng

et al. 2018

International Journal of Distributed Sensor Networks

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A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor's resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.

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“…This technology is still facing challenges in view of uniformity and large scale applicability. On the contrary, Lamb wave resonators employing the S 0 mode (S 0 -LWR) have demonstrated great potential for gravimetric sensors and suitability for in-liquid operation [8] with the advantage of using commercial c-oriented piezoelectric technology. The in-liquid sensing mechanisms and performance of S 0 -LWRs have been thoroughly described only recently [9,10], however they have not been compared to their FBAR counterparts.…”

Section: Introductionmentioning

confidence: 99%

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

Mirea

Iborra

Yantchev

2016

2016 European Frequency and Time Forum (EFTF)

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Sensors capable of in-liquid operation are of primary importance not only for biosensors applications but also for liquid monitoring. Thin film electroacoustic (TEA) devices have emerged as promising choice for such applications. The most common TEA devices are the thin film bulk acoustic wave resonator (FBAR) and the Lamb wave resonator (LWR). FBAR operating on the shear mode have been widely studied in view of biosensors applications. A theoretical framework describing the in-liquid sensitivity features of LWR employing the S0 mode (S0-LWR) has been experimentally proven recently. However, a comparison between both devices has not been performed yet. Here we theoretically and experimentally compare AlN-based S0-LWR and FBARs on their solidly mounted modality (SMR), in terms of their in-liquid sensitivity features at similar frequencies.S0-LWR prove to be slightly more sensitive to the density and viscosity of the liquids. Moreover, if a metallic bottom electrode is not deposited on their backside they can also sense variations in the dielectric permittivity of the liquid, which cannot be done with common SMRs.

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Sensitivity Features of Thin Film Plate Acoustic Wave Resonators

Cited by 15 publications

References 12 publications

Simulation and Fabrication of Higher‐Mode Lamb Wave Acoustic Devices for Sensing Applications

Simulation and Fabrication of Higher‐Mode Lamb Wave Acoustic Devices for Sensing Applications

A film bulk acoustic resonator pressure sensor based on lateral field excitation

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

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