Sheet Resistance Measurement of Non-Standard Cleanroom Materials Using Suspended Greek Cross Test Structures

Enderling, S.; Brown, Chelsea L.; Smith, S.; Dicks, M.H.; Stevenson, J.T.M.; Mitkova, M.; Kozicki, Michael; Walton, A.J.

doi:10.1109/tsm.2005.863248

Cited by 46 publications

(24 citation statements)

References 8 publications

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“…The Greek crosses that are visible in the test set in Fig. 1 are used to measure the sheet resistance R S [23]. The average value of the measured R S was 90 mΩ corresponding to 1.1E07 S/m conductivity for 1-µm conductor thickness.…”

Section: Test Structuresmentioning

confidence: 99%

Human Body Effects on Inkjet-Printed Flexible Rf Interconnections

Alam¹,

Sillanpää²,

Makinen³

2013

PIER C

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Abstract-The effect of human body on inkjet-printed flexible singlelayer transmission lines in immediate proximity of body is investigated by simulations and measurements up to 9 GHz. A multiline extraction method is used to obtain effective material parameters allowing detailed analysis of body effects. Already at 1 mm distance from the body, the line properties converge toward the free-space values. However, at smaller distances and in direct contact with the body, often required in biosensor applications, there is a significant change in characteristic impedance and increase in losses. The results of the paper can be used to evaluate the body effects at different frequencies and at different small distances from the body.

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Section: Test Structuresmentioning

confidence: 99%

Human Body Effects on Inkjet-Printed Flexible Rf Interconnections

Alam¹,

Sillanpää²,

Makinen³

2013

PIER C

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“…The electrical properties of the dielectric and conductor layers are listed in Table 1. The parameters for the conductor were obtained from the average dc sheet resistance R s = 40 mΩ/ measured from 10 Greek cross [17] test structures. Highfrequency analysis with multiline characterization method [18][19][20] [21] confirmed the validity of using the dc value at 2.4 GHz.…”

Section: Design Methodsmentioning

confidence: 99%

Radio Interface Design for Inkjet-Printed Biosensor Applications

Jalo¹,

Sillanpää²,

Makinen³

2013

PIER

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Abstract-Biomedical wireless sensors require thin, lightweight, and flexible single-layer structures operating in immediate proximity of human body. This poses a challenge for RF and antenna design required for wireless operation. In this work, the radio interface design for a 2.4 GHz wireless sensor including a discrete filter balun circuit and an antenna operating at 0.3 mm distance from the body is presented. Thin, lightweight single-layer structure is realized using printed electronics manufacturing technology. The RF and antenna designs are validated by measurements, and a sensor with a fully functional radio interface is implemented and verified. At 0.3 mm from the body, 2.4 dB insertion loss and −10 dBi realized gain at 2.4 GHz were achieved for a discrete filter balun and antenna, respectively. The received power level on a Bluetooth low energy (BLE) channel was above −80 dBm at 1 m distance from the body, indicating capability for short-range off-body communications. The paper also provides guidelines for printed electronics RF and antenna design for on-body operation.

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“…In practice, this is not possible (Figure 2.5). Enderling and co-workers [78] proposed to use suspended Greek Crosses to overcome this problem. However, this is only suitable for films with a poor step coverage (e.g.…”

Section: Motivationmentioning

confidence: 99%

“…The correction factors are obtained using the mathematical technique described in [78] and verified using a finite element analysis method.…”

Section: Extracted Sheet Resistancementioning

confidence: 99%

Nanolink-based thermal devices : integration of ALD tin thin films

Groenland¹

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Publisher: Gildeprint Drukkerijen, Enschede MS Word thesis template by Ihor BrunetsThe cover shows an optical micrograph (topview) of Greek Cross shaped four-point structures with buried electrodes (chapter 2) for the electrical characterization of ultrathin ALD TiN layers ('Dead Cow van der Pauws') during the fabrication process after wet chemical etching of the ALD TiN layer stack, showing redeposited photoresist residues of square-shaped contact chain structures (which are located outside the image).

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Sheet Resistance Measurement of Non-Standard Cleanroom Materials Using Suspended Greek Cross Test Structures

Cited by 46 publications

References 8 publications

Human Body Effects on Inkjet-Printed Flexible Rf Interconnections

Human Body Effects on Inkjet-Printed Flexible Rf Interconnections

Radio Interface Design for Inkjet-Printed Biosensor Applications

Nanolink-based thermal devices : integration of ALD tin thin films

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