2008
DOI: 10.1364/oe.16.016093
|View full text |Cite
|
Sign up to set email alerts
|

Short-wavelength MEMS-tunable VCSELs

Abstract: We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
13
0

Year Published

2009
2009
2021
2021

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 24 publications
(13 citation statements)
references
References 27 publications
0
13
0
Order By: Relevance
“…50), but are yet to be considered for quantum optomechanical applications. Typically, these devices employ plane-parallel geometries, which places a severe constraint on the minimum lateral dimensions of the suspended mirror structure in order to minimize diffraction losses (51).…”
Section: Experimental Feasibilitymentioning
confidence: 99%
See 1 more Smart Citation
“…50), but are yet to be considered for quantum optomechanical applications. Typically, these devices employ plane-parallel geometries, which places a severe constraint on the minimum lateral dimensions of the suspended mirror structure in order to minimize diffraction losses (51).…”
Section: Experimental Feasibilitymentioning
confidence: 99%
“…The small-mode-volume cavity considered here provides the bandwidth necessary to accommodate the short optical pulses and additionally offers a large optomechanical coupling rate. One technical challenge associated with these microcavities is fabrication with sufficient tolerance to achieve the desired optical resonance (under the assumption of a limited range of working wavelength), however this can be overcome by incorporating electrically controlled tunability of the cavity length (50,52,53). For a mechanical resonator with eigenfrequency ω M ∕2π ¼ 500 kHz and effective mass m ¼ 10 ng, the mechanical groundstate size is x 0 ¼ ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi ℏ∕mω M p ≃ 1.8 fm and optomechanical coupling proceeds at g 0 ∕2π ¼ ω c ðx 0 ∕ ffiffi ffi 2 p LÞ∕2π ≃ 86 kHz, where ω c is the mean cavity frequency and L is the mean cavity length.…”
Section: Experimental Feasibilitymentioning
confidence: 99%
“…1 illustrates a three-dimensional cutaway view of the device employed in this work. The laser cavity employs a thin wide-gain InP-based multi-quantum well (MQW) active region joined by wafer bonding to a wideband bottom GaAs-based fully oxidised Al x O y -GaAs mirror, with tuning enabled via the integration of a dielectric micromechanical actuator similar to that presented in [5]. In this configuration, the top dielectric mirror is separated from the underlying ‘half-VCSEL’ structure by an air-gap which is tuned by electrostatic actuation.…”
Section: Device Structure and Fabricationmentioning
confidence: 99%
“…Although MEMS-VCSELs were first conceived in the mid 1990's 6,7 , development efforts in the field until 2009 were driven primarily by telecommunications and narrow-tuning spectroscopic applications [8][9][10] . In 2009, Praevium Research, Advanced Optical Microsystems, commercial partner Thorlabs, and academic partner Massachusetts Institute of Technology (MIT) began developing a swept source based on amplified MEMS-VCSELs, targeting SS-OCT as a primary application.…”
Section: Introductionmentioning
confidence: 99%