SiCN ceramic patterns fabricated by soft lithography techniques

Guided-Mode Resonance Filters Fabricated with Soft Lithography

“…Often, holographic interferometry, or direct electron-beam patterning, is used to define the periodic structure. As an alternative method, soft lithography is effective for fabricating and transferring periodic patterns and structures as reported in recent papers (Xia & Whitesides, 1998) (Xia et al, 1999) (Schmid & Michel, 2000) (Odom et al, 2002) (T.-W. (Tang et al, 2003) (Rogers & Nuzzo, 2005) (D.-H. Lee et al, 2007). Accordingly, using methods and processes associated with soft lithography, new narrow-band resonant optical filters fabricated in hybrimer compounds are presented.…”

SiC ceramic micropatterns from polycarbosilanes

“…10 Micropatterning of ceramics using polymeric ceramic precursors has gained particular interest due to facile shaping processes and their applications in mechanical devices, energy systems, bioengineering, biomedical science or as catalyst supports. [11][12][13][14] Conventional techniques for micropatterning of SiC, Si 3 N 4 and SiBNC using reactive ion etching 15 are time consuming and cost intensive. Liquid polymeric ceramic precursors are suitable candidates to generate complex ceramic features applying soft lithographic techniques without the need for etching procedures.…”

“…Liquid polymeric ceramic precursors are suitable candidates to generate complex ceramic features applying soft lithographic techniques without the need for etching procedures. 13,16 The fabrication of microelectromechanical systems made from oxidation resistant SiBNC ceramics using soft lithographic techniques was recently reported. 14 Nanoscale SiCN ceramic were obtained from a polyvinylsilazane on silicon substrates by combining imprinting lithographic and a modified "micromoulding in capillaries" technique.…”

“…14 Nanoscale SiCN ceramic were obtained from a polyvinylsilazane on silicon substrates by combining imprinting lithographic and a modified "micromoulding in capillaries" technique. 13 A major challenge for the application of preceramic polymers in ceramic manufacturing is the reduction of extensive cracking and pore formation, which generally occurs when the structural changes in the polymer-derived phase cannot be relaxed by viscous flow or diffusion based material transport. Thus, direct conversion of a polymer compact into dense ceramic compacts appears to be difficult whereas defect free low dimensional products such as fibres or coatings can be readily fabricated.…”

Fabrication of SiOC Ceramic Microparts and Patterned Structures from Polysiloxanes via Liquid Cast and Pyrolysis

“…Liew et al fabricated SiCN sensors and a variety of SiCN microstructures using the same kind of precursor via thermal, chemical, and photo-polymerization. [21][22][23] Recently, Kim et al 24 and Chung et al 25 fabricated micropatterns and free-standing SiCN microstructures, respectively, from Cerasett via photo-crosslinking. Until now, the fabrication of ceramic MEMS by the PDC process has been limited to the polysilazane precursors.…”