2007 IEEE Workshop on Signal Propagation on Interconnects 2007
DOI: 10.1109/spi.2007.4512222
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Signal propagation over perforated reference planes

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“…This is consistent with Lei Shan et al who have shown that voids/holes results in signal losses which scale with the size of the voids/hole. In addition, the increased losses with thermal cycling can be caused by compositional changes in the SiO x isolation liner [3]. To further understand the changes in the liner oxide, we used a variety of scanning probe techniques to measure the changes in the electrical properties of the isolation around the Si-TSVs.…”
Section: Resultsmentioning
confidence: 99%
“…This is consistent with Lei Shan et al who have shown that voids/holes results in signal losses which scale with the size of the voids/hole. In addition, the increased losses with thermal cycling can be caused by compositional changes in the SiO x isolation liner [3]. To further understand the changes in the liner oxide, we used a variety of scanning probe techniques to measure the changes in the electrical properties of the isolation around the Si-TSVs.…”
Section: Resultsmentioning
confidence: 99%