Time-of-flight secondary ion mass spectrometry (TOF-SIMS) has been used to analyse the surface composition of organic-inorganic hybrid solids obtained by a sol-gel process. Gels of type O(1.5)Si-R-SiO(1. 5), obtained from bis-silylated precursors (R'O)(3)-R-Si(OR')(3) (R' = Me, Et and R = (-CH(2))(n)-, n = 1, 2, 6, 10, 12;--CH=CH-; (-CH(2))(3)NH(CH(2))(3)-; 1, 1'-ferrocenyl; (CH(2))(n)-Ph-(CH(2))(n)- with Ph = 1,4-phenylene and n = 0, 1, 2; Ph = 1,3,5-phenyl and n = 0) were analysed. The results were highly dependent on the nature of the organic group. When the organic group was small or 'rigid', the main peaks detected corresponded to SiOH and SiOR' residual groups. Fragment ions from the organic group were poorly detected in this case. When the organic group was larger and more 'flexible', characteristic mass fragment ions were detected at higher relative intensities, indicative of a different organization of the organic units in the solid. TOF-SIMS clearly showed the differences between the xerogels derived from mono- and bis-silylated organic precursors : the organic group is present at the surface of mono-silylated xerogels, whereas for bis-silylated ones, the organization is dependent on the length and the flexibility of the organic units. These TOF-SIMS results are in agreement with other features already reported. Copyright 1999 John Wiley & Sons, Ltd.