Silicon anti-resonant reflecting optical waveguides for sensor applications

Benaissa, K.; Nathan, Arokia

doi:10.1016/s0924-4247(97)01645-2

Cited by 23 publications

(17 citation statements)

References 33 publications

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“…These features is quite attractive for sensing applications, so ARROWs employment in highly sensitive and low cost integrated optical sensors has been discussed [25-27]. In [28] a Mach-Zehnder interferometer adopting an ARROW as guiding structure has been used to fabricate a 15 mm long optical biosensor having a detection limit of 2×10 −5 .…”

Section: Integrated Optical Biosensorsmentioning

confidence: 99%

Guided-Wave Optical Biosensors

Passaro

Dell’Olio

Casamassima

et al. 2007

Sensors

135

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Guided-wave optical biosensors are reviewed in this paper. Advantages related to optical technologies are presented and integrated architectures are investigated in detail. Main classes of bio receptors and the most attractive optical transduction mechanisms are discussed. The possibility to use Mach-Zehnder and Young interferometers, microdisk and microring resonators, surface plasmon resonance, hollow and antiresonant waveguides, and Bragg gratings to realize very sensitive and selective, ultra-compact and fast biosensors is discussed. Finally, CMOS-compatible technologies are proved to be the most attractive for fabrication of guided-wave photonic biosensors.

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Section: Integrated Optical Biosensorsmentioning

confidence: 99%

Guided-Wave Optical Biosensors

Passaro

Dell’Olio

Casamassima

et al. 2007

Sensors

135

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“…A push-pull MZI fabricated using ARROWs has been developed at the University of Waterloo (Canada) as a pressure sensor [154]; conventional fiber input was employed and a technology for monolithic integration of output photodiodes was also developed. Despite the fact that the ARROW can only propagate the TE mode, a 60 µm thick, 3615 mm diaphragm led to a half-wave pressure of 40 kPa [155].…”

Section: Pressure Sensorsmentioning

confidence: 99%

Semiconductor Optical Sensors

Zappe

1999

Sensors Update

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“…A typical example of monolithic integration is the optical pressure sensor on silicon membranes. Deformation of membrane and integrated waveguide are detected using a Mach-Zehnder [1][2][3][4][5][6][7] configuration that convert the phase shift in the light propagation in intensity modulation.…”

Section: Introductionmentioning

confidence: 99%

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

et al. 2004

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While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will allow the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated with the piezoelectric (PZT) actuated membrane.

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Silicon anti-resonant reflecting optical waveguides for sensor applications

Cited by 23 publications

References 33 publications

Guided-Wave Optical Biosensors

Guided-Wave Optical Biosensors

Semiconductor Optical Sensors

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

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