2000
DOI: 10.1016/s0955-2219(00)00009-1
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Silicon carbonitride ceramics derived from polysilazanes Part II. Investigation of electrical properties

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Cited by 132 publications
(114 citation statements)
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“…Previous studies, which primarily focused on DC (direct current) behavior, revealed that the conductivity of PDCs could increase by several orders of magnitude with increasing pyrolysis temperature before crystallization [7,18,19]. The increase was believed to be caused by the sp 3 -sp 2 transition of the free-carbon phase [17], which was confirmed recently by Chen et al [20,21] and Wang et al [22] in different PDC systems.…”
Section: Introductionmentioning
confidence: 72%
See 1 more Smart Citation
“…Previous studies, which primarily focused on DC (direct current) behavior, revealed that the conductivity of PDCs could increase by several orders of magnitude with increasing pyrolysis temperature before crystallization [7,18,19]. The increase was believed to be caused by the sp 3 -sp 2 transition of the free-carbon phase [17], which was confirmed recently by Chen et al [20,21] and Wang et al [22] in different PDC systems.…”
Section: Introductionmentioning
confidence: 72%
“…The AC (alternative current) conductivity of PDCs was also reported occasionally. Haluschka et al [18] reported a strong frequency-dependent conductivity in polymerderived silicon carbonitride, and attributed the phenomenon to a large polaron tunneling process [18]. Wang and co-workers [24] reported the complex impedance spectra of the polymer-derived silicon oxycarbide ceramics.…”
Section: Introductionmentioning
confidence: 99%
“…With further research on upscaling and mechanical properties, this siloxane is a promising candidate for actuators and sensors. Contrary to sealing with low electrical conductivity, polymer-derived ceramics offer great potential for application in micro-electrical systems as they exhibit higher conductivities [150,151]. Dalcane et al performed the hydrosilylation of allylhydrido-poly(carbosilane) SMP10 ® with divinylbenzene followed by pyrolysis at 800-1400 • C, yielding ceramics with electrical conductivities ranging from 10 −6 S·cm −1 (semiconductor) to 1 S·cm −1 (conductor) [152].…”
Section: Microelectronic Applicationsmentioning
confidence: 99%
“…Yajima studied the effects of pyrolysis temperature on the resistivities of polycarbosilane-derived SiC and suggested a possible application in fabricating small-size igniters [31]. Cordelair et al reported the electrical properties of polysilazane-derived SiCN and SiOC ceramics, which depended on the pyrolysis conditions and subsequent annealing [32][33][34][35]. Kim et al studied the electrical conductivities of dense, bulk SiOC ceramics prepared at different temperatures.…”
Section: Introductionmentioning
confidence: 99%