2014
DOI: 10.1364/ome.4.001345
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Silicon nanopillar arrays with SiO_2 overlayer for biosensing application

Abstract: Abstract:We present the fabrication of silicon dioxide (SiO 2 ) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO 2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VI… Show more

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Cited by 32 publications
(15 citation statements)
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“…Structuring the surface of the layer by means of the fabrication of pillars [18][19][20][21], holes [22,23], or using a layer of porous material could increase the sensing surface of the sensing cell, besides presenting a particular confinement of the light [24] which may result in a better sensitivity or limit of detection. Biosensors based on porous silicon were reported in 1997 [25] and many variations on the same biosensing principle have been also reported since [26], using layers with a variety of porosity values and configurations.…”
Section: Vertical Sensorsmentioning
confidence: 99%
“…Structuring the surface of the layer by means of the fabrication of pillars [18][19][20][21], holes [22,23], or using a layer of porous material could increase the sensing surface of the sensing cell, besides presenting a particular confinement of the light [24] which may result in a better sensitivity or limit of detection. Biosensors based on porous silicon were reported in 1997 [25] and many variations on the same biosensing principle have been also reported since [26], using layers with a variety of porosity values and configurations.…”
Section: Vertical Sensorsmentioning
confidence: 99%
“…The potential of diamond as an electrochemical transducer has attracted remarkable interest due to its chemical stability, wide potential window, low background current and bio-compatibility [53,[84][85][86] of other commonly exploited materials such as silicon (Si) [87,88], silicon dioxide (SiO 2 ) [89,90], tin dioxide (SnO 2 ) [91,92], gold (Au) [93,94] and glassy carbon [95,96]. High-quality diamond films typically possess a potential window of ≥ 3.25 V, owing to the large over-potentials for both oxygen and hydrogen evolution [97,98] as a result of diamond to be either insulating, semiconducting or metallic, with its appearance moving from transparent to black (optical gap of 5.47 eV), as a result of diamonds ability to be either p-or n-type doped [97][98][99].…”
Section: Diamondmentioning
confidence: 99%
“…In general, the formation for such oxide thin lms should be conducted in mild conditions to remain the optical and mechanical properties of polymer substrate, therefore, the traditional micropatterning strategies involving erosive chemicals or high temperature conditions are no longer favoured. 7,12,13 Silica micron/submicron-sized patterns were reported to be fabricated on substrates for the application in patterning techniques, 13,14 optics, 15,16 optoelectronics, 17 microelectronics, 18 sensors, 19 and biotechnology. 20,21 A top-down approach for the silica patterning applicable to arbitrary substrates was reported, which sputtered silica lms onto photoresist-patterned surface.…”
Section: Introductionmentioning
confidence: 99%