2001
DOI: 10.1109/7384.963464
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Silicon on sapphire CMOS for optoelectronic microsystems

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Cited by 49 publications
(16 citation statements)
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“…We designed and fabricated an optical receiver in the 0.25µm ultra-thin silicon-on-sapphire (SOS) technology developed by Peregrine Semiconductor [4]. Similar to other SOI processes, SOS CMOS transistors are fabricated on a 100 nm layer of silicon supported by an insulating sapphire substrate, reducing parasitic capacitance, body effect, and substrate crosstalk between devices.…”
Section: Receiver Architecturementioning
confidence: 99%
“…We designed and fabricated an optical receiver in the 0.25µm ultra-thin silicon-on-sapphire (SOS) technology developed by Peregrine Semiconductor [4]. Similar to other SOI processes, SOS CMOS transistors are fabricated on a 100 nm layer of silicon supported by an insulating sapphire substrate, reducing parasitic capacitance, body effect, and substrate crosstalk between devices.…”
Section: Receiver Architecturementioning
confidence: 99%
“…The smart pixel chips combine Ultra-Thin Silicon (UTSi) ASICs with VCSEL and detector arrays and micro-lens collimating elements. The inherent transparency of the sapphire substrate of the ASIC obviates the need for any substrate removal of the VCSEL and detector arrays [37]. The emitted light passes through the sapphire substrate and the back surface of the sapphire provides a convenient location to implement beam-conditioning micro-optics.…”
Section: D Free-space Optics Summarymentioning
confidence: 99%
“…The mechanical polishing resulted in an optically clear die on both side. Alternatively index matching fluid can be employed to fill in the asperities of the backside [2]. The effectiveness of the mechanical polishing is evident in figure 3.…”
Section: Resultsmentioning
confidence: 97%
“…In the next version of the chip, the wired-or will be replaced with a tree based fully CMOS design, thus reducing dramatically the power dissipation. The circuit design both for the pixel and periphery employs the available zero threshold transistors [2] to reduce the complexity, minimizing the number of transistors and wires necessary for bias circuits. Both analog and digital power consumption measurements were conducted using a supply voltage of 3.3V and with an output event rate of 0.48M events/s.…”
Section: Resultsmentioning
confidence: 99%
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