Silicon planar refractive optics for coherent x-ray sources: metrology and manufacturing approaches

N., Sorokovikov, M.; Zverev, D.; Yunkin, V.; Кузнецов, С. П.; Snigirev, A.

doi:10.1117/12.2594815

Cited by 4 publications

(2 citation statements)

References 5 publications

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“…For the parabolic lenses analysis and measurements, we used SEM-based methods proposed earlier 5 . One Si parabolic lens from the first CRLs array has been selected for control its critical dimensions and shapes by using three different methods.…”

Section: Manufacturing and Metrologymentioning

confidence: 99%

See 1 more Smart Citation

Metrology of a coherent x-ray beam expander for advanced synchrotron sources

N.¹,

Zverev

Yunkin³

et al. 2022

Advances in X-Ray/Euv Optics and Components XVII

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The X-ray beam expander for advanced synchrotron sources based on Si planar compound parabolic refractive lenses (CRLs) with aperture of 10 micron was considered. The lenses were fabricated by using MEMS technologies including a lithography and a deep silicon etching for CRLs pattern generation in the hard mask and the pattern transfer into silicon wafer down to 40 μm, respectively. To minimize an influence of the manufacturing errors on the CRLs optical properties special control and metrology of the geometrical parameters of the lenses were proposed and applied. The errors influence on the X-ray beam expander parameters was considered theoretically and the related computer simulations were performed.

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Section: Manufacturing and Metrologymentioning

confidence: 99%

“…Previously 2,4,5 , it was shown that there are distortions in the focusing properties of lenses associated with deviations of the geometric parameters from the calculated ones. The maximum manufacturing errors were introduced in the processes of deep anisotropic plasma etching of Si.…”

Section: Introductionmentioning

confidence: 99%