Silicon technology for optical MEMS

Moore, David F.; Syms, R.R.A.

doi:10.1051/epn:2003101

Cited by 4 publications

(4 citation statements)

References 3 publications

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“…The main drawback of this kind of fiber holder clips is that they are not elastic and the inserted optical fiber could be loose and lost its alignment accuracy with other optic components. The ideal solution is to fabricate fiber holder with an elastic microclips [4,12] because they can ensure that the bottom of the fiber holder structure is the accurate height reference with respect to the lens. At the same time, it also can compensate for fiber tolerances.…”

Section: Resultsmentioning

confidence: 99%

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SU-8 3D microoptic components fabricated by inclined UV lithography in water

Ling

Lian

2006

Microsyst Technol

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Out-of-plane microlenses and microoptical fiber holder are two of the most important components for building an integrated microoptic system with a precise alignment accuracy. In this paper, a simple and convenient method to fabricate these components from SU-8 by using inclined UV lithography in water is proposed. It consists of two perpendicular exposures in SU-8 at ±45°. DI water possesses a low absorption coefficient and a moderate and stable value of refractive index in near UV. Using water, the exposure angle in SU-8 can be increased to 50°from 35°in air necessary to pattern the desired 45°slope of the sidewalls. The principle of the proposed technique and the detailed fabrication process of the microoptic components will be presented. The integratability of the fabricated components was demonstrated by the fabrication of the microoptical fiber holder with a pre-aligned out-of-plane microlens.

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Section: Resultsmentioning

confidence: 99%

“…The optical fiber holder is another important element in microoptic system, which helps to build an integrated system with predictable alignment accuracy. A variety of approaches have been attempted to achieve this, including V-groove made by silicon wet etching [4] and LIGA-based flexible structures [5].…”

Section: Introductionmentioning

confidence: 99%

SU-8 3D microoptic components fabricated by inclined UV lithography in water

Ling

Lian

2006

Microsyst Technol

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“…This enabled effective assessment of the bonding-technique quality with regard to the optical properties of the coupled optical fibers. Optical fibers are conventionally positioned in V-grooves made by chemical etching of silicon in the "111" plane [4].…”

Section: Manufacturing V-groovesmentioning

confidence: 99%

Hot gas stream application in micro-bonding technique

et al. 2006

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This paper presents a new concept for bonding micro-parts with dimensions in the range of 50 µm to 300 µm. Two different kinds of adhesives -polyurethane adhesive foil and hot melt glue -were applied to a basic substrate by different techniques. The focused and concentrated hot gas stream softened glue which had been applied in a solid state. Micro-parts were then embossed in the softened glue, or covered and shielded by it. In this way, a rigid and compact bond was obtained after cooling. For the positioning of micro-parts (optical fibers), it has been necessary to manufacture adequate V-grooves. Finite element analyses using the ANSYS TM program package were performed in order to evaluate parameters which govern the heat transfer to the adhesive and substrate respectively. Experimental results are in good agreement with results obtained by the numerical simulations. The advantages of this new approach are small system size, low capital costs, simple usage, applicability to many material combinations, easy integration into existing production lines, etc.

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“…Optical fibers are positioned in V-grooves to achieve requested alignment and positioning precision. V-grooves are made by chemical etching of silicon in the "111" plane with the slope of 54, 7 [6]. The thick layer of SiO 2 (1.2 m) was grown on the silicon layer by dry thermal deposition.…”

Section: Process Of Joiningmentioning

confidence: 99%

Thermal Characterization of the Micro Bonding Process Using a Hot Air Stream

Andrijasevic

Giouroudi

Smetana

et al.

2006 25th International Conference on Microelectronics

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The possible solution for bonding two different materials with intermediate layer of adhesive at relatively low temperatures in the micro domain is proposed in this paper. A stream of hot gas has been used for melting and softening different kinds of adhesives. After cooling down at room temperature, adhesives harden forming a stabile and strong bond. The gas is heated as it passes through the tube with the heater developed on it. The parameters which induce the heat transfer and the process performance generally are considered through various experiments and by numerical simulations. Some advantages of this process are applicability for different material combinations, cost and time efficiency, compact size of equipment etc.

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Silicon technology for optical MEMS

Cited by 4 publications

References 3 publications

SU-8 3D microoptic components fabricated by inclined UV lithography in water

SU-8 3D microoptic components fabricated by inclined UV lithography in water

Hot gas stream application in micro-bonding technique

Thermal Characterization of the Micro Bonding Process Using a Hot Air Stream

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