Silicon waveguide sidewall smoothing by wet chemical oxidation

Sparacin, Daniel K.; Spector, Steven J.; Kimerling, Lionel C.

doi:10.1109/jlt.2005.851328

Cited by 163 publications

(97 citation statements)

References 15 publications

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“…For the past years, several research groups have developed essential building blocks and proof-of-concept devices overcoming some of the challenges in Silicon Photonics platform, for example efficient coupling systems from optical fibers to optical waveguides [2], low-loss optical waveguides [3], electro-optic modulators [4,5], all optical devices [6], reconfigurable devices [7,8], and unidirectional devices [9].…”

Section: Introductionmentioning

confidence: 99%

Compact and low power consumption tunable photonic crystal nanobeam cavity

Fegadolli¹,

Oliveira²,

Almeida³

et al. 2013

Opt. Express

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A proof-of-concept for a new and entirely CMOS compatible tunable nanobeam cavity is demonstrated in this paper. Preliminary results show that a compact nanobeam cavity (~20 μm 2 ) with high Q-factor (~50,000) and integrated with a micro-heater atop, is able of tuning the resonant wavelength up to 15 nm with low power consumption (0.35nm/mW), and of attaining high modulation depth with only ~100 μW. Additionally, a tunable bi-stable behavior is reported.

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Section: Introductionmentioning

confidence: 99%

Compact and low power consumption tunable photonic crystal nanobeam cavity

Fegadolli¹,

Oliveira²,

Almeida³

et al. 2013

Opt. Express

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“…The template was prepared according to a previously reported procedure [36,37]. First, silicon nitride was deposited on a clean silicon wafer.…”

Section: Template Fabricationmentioning

confidence: 99%

Self-Assembled Plasmonic Pyramids from Anisotropic Nanoparticles for High-Efficient SERS

et al. 2017

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Surface-enhanced Raman scattering (SERS) substrates play important roles for the enhancement of inelastic scattering signals. Traditional substrates such as roughened electrodes and colloidal aggregates suffer from well-known signal reproducibility issues, whereas for current dominant two-dimensional planar systems, the hot spot distributions are limited by the zero-, one-or two-dimensional plane. The introduction of a three-dimensional (3D) system such as a pyramid geometry breaks the limitation of a single Cartesian SERS-active area and extends it into the z-direction, with the tip potentially offering additional benefits of strong field enhancement and high sensitivity. However, current 3D pyramidal designs are restricted to film deposition on prepared pyramid templates or self-assembly in pyramidal molds with spherical building blocks, hence limiting their SERS effectiveness. Here, we report on the fabrication of a new class of low cost and well-defined plasmonic nanoparticle pyramid arrays from different anisotropic shaped nanoparticles using combined top-down lithography and bottom-up self-assembly approach. These pyramids exhibit novel optical scattering properties that can be exploited for the design of reproducible and sensitive SERS substrate. The SERS intensity was found to decrease drastically in accordance with a power law function as the focal planes move from the apex of the pyramid structure towards the base. In comparison to sphere-based building blocks, pyramids assembled from anisotropic rhombic dodecahedral gold nanocrystals with numerous sharp tips exhibited the strongest SERS performance.Graphical Abstract Macroscale pyramidal array films with plasmonic tunability as a new class of SERS substrate for sensitive detection of chemicals.

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“…Since the sidewall roughness of both waveguide profiles are similar, the micro-bend loss reduction can be clearly attributed to photonic wire sidewall angle. The tradeoff between the micro-bend loss and propagation loss of the vertical sidewall photonic wires can be compensated by using post-fabrication treatements [10]. Various processes, such as wet chemical etching and oxidation has been proposed to reduce the sidewall roughness generated during the patterning process.…”

Section: Photonic Wire Propagation and Bend Lossmentioning

confidence: 99%

Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

Selvaraja

Bogaerts

Thourhout

2011

Optics Communications

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Single mode silicon photonic wire waveguides allow low-loss sharp micro-bends, which enables compact photonic devices and circuits. The circuit compactness is achieved at the cost of loss induced by micro-bends, which can seriously affect the device performance. The bend loss strongly depends on the bend radius, polarization, waveguide dimension and profile. In this paper, we present the effect of waveguide profile on the bend loss. We present waveguide profile improvement with optimized etch chemistry and the role of etch chemistry in adapting the etch profile of silicon is investigated. We experimentally demonstrate that by making the waveguide sidewalls vertical, the bend loss can be reduced up to 25% without affecting the propagation loss of the photonic wires. The bend loss of a 2 µm bend has been reduced from 0.039dB/90 o bend to 0.028dB/90 o bend by changing the sidewall angle from 81 o to 90 o respectively. The propagation loss of 2.7 ± 0.1dB/cm and 3 ± 0.09dB/cm was observed for sloped and vertical photonic wires respectively was obtained.

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Silicon waveguide sidewall smoothing by wet chemical oxidation

Cited by 163 publications

References 15 publications

Compact and low power consumption tunable photonic crystal nanobeam cavity

Compact and low power consumption tunable photonic crystal nanobeam cavity

Self-Assembled Plasmonic Pyramids from Anisotropic Nanoparticles for High-Efficient SERS

Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

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