Simulation of circular silicon pressure sensors with a center boss for very low pressure measurement

Yasukawa, Akio; Shimazoe, Michitaka; Matsuoka, Yoshitaka

doi:10.1109/16.30935

Cited by 48 publications

(18 citation statements)

References 7 publications

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“…A converter measures physical stimulus such as pressure and converts it into an electrical signal in capacitance. The capacitive-type sensors have been developed and studied for many years due to their advantages, which include high resolution, a robust structure and lower power consumption than sensors using piezoresistive effects [1]- [5]. Enhancement of sensor design with complex fabrication techniques makes it more difficult to adapt to new applications, as changes to any geometry layer affect the mechanical properties of the sensor [6].…”

Section: Introductionmentioning

confidence: 99%

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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This paper presents the development of a novel one-side-electrode-type fluidic-based capacitive pressure sensor. A pressure sensor using a one-side-electrode and an implementation of electrical double layer capacitance concept was proposed. Mechanical analysis of the membrane was carried out using the finite-element analysis in terms of deflection and Mises stress. A sensor with a circular membrane radius of 3.2 mm, membrane thickness of 0.8 mm, microchannel thickness of 0.5 mm, and microchannel width of 0.5 mm was fabricated using polydimethylsiloxane. The validation was made between the analytical and experimental results for fluid mechanisms inside the sensor. This showed that the displacement for all types of liquid, including methanol, ethanol, and silicon oil was linearly aligned. Methanol was chosen as an electrolyte due to its liquid properties, such as low surface tension and dielectric permittivity. From the experimental results, the operating frequency, response time, and sensitivity of the sensor were 1.2 kHz, 0.12 s, and 0.77 pF/kPa, respectively. The effects of vibration, temperature, and lifetime were also discussed in this paper.Index Terms-Capacitive pressure sensor, electrical double layer, PDMS, electrolyte.

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Section: Introductionmentioning

confidence: 99%

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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“…In fact, straightforward substitution into (5) gives capacitances of 4.16 and 2500 pF in the two cases, and direct experimental measurements have confirmed these numbers. 3 Fig . 6 shows a plot of the total pressure calculated from (10) as a function of the capacitance C, along with the actual pressure that was measured in a pressure chamber.…”

Section: Resultsmentioning

confidence: 96%

Capacitive Pressure Sensor With Very Large Dynamic Range

Bakhoum

Cheng

2010

IEEE Trans. Comp. Packag. Technol.

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A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.Index Terms-Capacitive pressure sensor, pressure sensor, sensor dynamic range.

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“…Firstly, the method of partially stiffening the diaphragm is applied to lower the sensor non-linearity [13][14][15] to alleviate the balloon effect and lower the non-linearity. And the sensor accuracy was 0.17% FS with the range of 5-100 kPa.…”

Section: Introductionmentioning

confidence: 99%