2001
DOI: 10.1088/0022-3727/34/13/311
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Simulations of geometrically pinched argon plasmas using an extended one-dimensional model

Abstract: The subject of this paper is the modelling of a wall-stabilized cylinder symmetric cascaded arc which is to be used as a high-density plasma source. To enhance the ion flux emerging from cascaded arc argon plasmas the confining wall can be changed into a nozzle geometry. Such pinched geometries increase the degree of ionization and convert the subsonic flow to supersonic.To study arcs with a varying cross section we introduce a one-dimensional non-local thermal equilibrium hydrodynamical model. In this model t… Show more

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Cited by 8 publications
(10 citation statements)
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“…In the plasma source, the product of the density and flow velocity is approximately constant over the source radius [22,23], and the density at the exit of the source can be estimated with In the DSMC simulation, the gas enters the simulation as an undisturbed free stream flow with the initial density set to the on-axis n(0), the initial velocity to c 0 and the initial temperature T (0) to 0.7 eV. The effective pump speeds are S1 = S2 = S3 ≈ 10.000 m 3 h −1 .…”
Section: Behavior Of the Neutral Fractionmentioning
confidence: 99%
“…In the plasma source, the product of the density and flow velocity is approximately constant over the source radius [22,23], and the density at the exit of the source can be estimated with In the DSMC simulation, the gas enters the simulation as an undisturbed free stream flow with the initial density set to the on-axis n(0), the initial velocity to c 0 and the initial temperature T (0) to 0.7 eV. The effective pump speeds are S1 = S2 = S3 ≈ 10.000 m 3 h −1 .…”
Section: Behavior Of the Neutral Fractionmentioning
confidence: 99%
“…It was assumed that the argon plasma exits the source at T e ∼ 0.7 eV 20 (nozzle radius r 0 = 4.75 mm, flow 3 slm ( = 1.35 × 10 21 s −1 ), and that the neutral density is constant over the nozzle radius. The n 0 densities at the exit n res,0 can be estimated as 23,24 n res,0 = c 0 πr…”
Section: Plasma Expansionmentioning
confidence: 99%
“…Completely different applications of the cascaded arc, filled with different working gases, can be found in the scientific community and in many places in industry, especially in high-speed etching and deposition processes [13]. Burm et al proposed a varying arc channel diameter to increase the ionization efficiency of a flowing cascaded arc [14][15][16] and Broks et al [17] performed a simulation with PLASIMO [18] on a specific geometry of a non-flowing cascaded arc. Surprisingly, the application as a light source is not very widespread.…”
Section: Introductionmentioning
confidence: 99%