Simultaneous immersion Mirau interferometry

Lyulko, Oleksandra V.; Randers-Pehrson, Gerhard; Brenner, David J.

doi:10.1063/1.4803181

Cited by 13 publications

(5 citation statements)

References 14 publications

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“…The presence of a mirror in the optical path of the Mirau interferometer leads to a loss of light, which is a drawback of the Mirau configuration compared with the Linnik configuration. 18 – 20 In the previously reported Mirau-based LC-OCT device, 15 the reference mirror had a rectangular shape with a length of 2 mm and a width of

. The loss of light was weak (8%).…”

Section: Mirau Interferometer Optimizationmentioning

confidence: 99%

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

Xue

Ogien²,

Bulkin

et al. 2022

J. Biomed. Opt.

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Significance: Line-field confocal optical coherence tomography (LC-OCT) is a recently introduced high-resolution imaging modality based on a combination of low-coherence optical interferometry and reflectance confocal optical microscopy with line illumination and line detection. Capable of producing three-dimensional (3D) images of the skin with cellular resolution, in vivo , LC-OCT has been mainly applied in dermatology and dermo-cosmetology. The LC-OCT devices capable of acquiring 3D images reported so far are based on a Linnik interferometer using two identical microscope objectives. In this configuration, LC-OCT cannot be designed to be a very compact and light device, and the image acquisition speed is limited. Aim: The objective of this work was to develop a more compact and lighter LC-OCT device that is capable of acquiring images faster without significant degradation of the resolution and with optimized detection sensitivity. Approach: We developed an LC-OCT device based on a Mirau interferometer using a single objective. Dynamic adjustment of the camera frequency during the depth scan is implemented, using a faster camera and a more powerful light source. The reflectivity of the beam-splitter in the Mirau interferometer was optimized to maximize the detection sensitivity. A galvanometer scanner was incorporated into the device for scanning the illumination line laterally. A stack of adjacent B-scans, constituting a 3D image, can thus be acquired. Results: The device is able to acquire and display B-scans at 17 fps. 3D images with a quasi-isotropic resolution of (1.3, 1.9, and in the , and directions, respectively) over a field of ( ) can be obtained. 3D imaging of human skin at cellular resolution, in vivo , is reported. Conclusions: The acquisition rate of the B-scans, at 17 fps, is unprecedented in LC-OCT. Compared with the conventional LC-OCT devices based on a Linnik interferometer, the reported Mirau-based LC-OCT device can acquire B-scans times faster. With potential advantages in terms of compactness and weight, a Mirau-based device could easily be integrated into a smaller and lighter handheld probe for use by dermatologists in their daily medical practice.

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. The loss of light was weak (8%).…”

Section: Mirau Interferometer Optimizationmentioning

confidence: 99%

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

Xue

Ogien²,

Bulkin

et al. 2022

J. Biomed. Opt.

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show abstract

“…The presence of a mirror in the optical path of the Mirau interferometer leads to a loss of light, which is a drawback of the Mirau configuration compared with the Linnik configuration. [18][19][20] In the previously reported Mirau-based LC-OCT device, 15 the reference mirror had a rectangular shape with a length of 2 mm and a width of 100μm. The loss of light was weak (8%).…”

Section: Beam Obscurationmentioning

confidence: 99%

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

Xue

Ogien²,

Bulkin

et al. 2022

Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XXVI

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Significance: Line-field confocal optical coherence tomography (LC-OCT) is a recently introduced high-resolution imaging modality based on a combination of low-coherence optical interferometry and reflectance confocal optical microscopy with line illumination and line detection. Capable of producing three-dimensional (3D) images of the skin with cellular resolution, in vivo, LC-OCT has been mainly applied in dermatology and dermo-cosmetology. The LC-OCT devices capable of acquiring 3D images reported so far are based on a Linnik interferometer using two identical microscope objectives. In this configuration, LC-OCT cannot be designed to be a very compact and light device, and the image acquisition speed is limited.Aim: The objective of this work was to develop a more compact and lighter LC-OCT device that is capable of acquiring images faster without significant degradation of the resolution and with optimized detection sensitivity. Approach:We developed an LC-OCT device based on a Mirau interferometer using a single objective. Dynamic adjustment of the camera frequency during the depth scan is implemented, using a faster camera and a more powerful light source. The reflectivity of the beam-splitter in the Mirau interferometer was optimized to maximize the detection sensitivity. A galvanometer scanner was incorporated into the device for scanning the illumination line laterally. A stack of adjacent B-scans, constituting a 3D image, can thus be acquired. Results:The device is able to acquire and display B-scans at 17 fps. 3D images with a quasiisotropic resolution of ∼1.5 μm (1.3, 1.9, and 1.1 μm in the x; y, and z directions, respectively) over a field of 940 μm × 600 μm × 350 μm (x × y × z) can be obtained. 3D imaging of human skin at cellular resolution, in vivo, is reported. Conclusions:The acquisition rate of the B-scans, at 17 fps, is unprecedented in LC-OCT. Compared with the conventional LC-OCT devices based on a Linnik interferometer, the reported Mirau-based LC-OCT device can acquire B-scans ∼2 times faster. With potential advantages in terms of compactness and weight, a Mirau-based device could easily be integrated into a smaller and lighter handheld probe for use by dermatologists in their daily medical practice.

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“…Another technique proposed by Lyulko et al [168] for increasing the lateral resolution of the Mirau interferometer involved developing an immersion Mirau interferometer to increase the NA. Moreover, simultaneous immersion Mirau interferometry (SIMI), which facilitates the simultaneous acquisition of all interferograms and eliminates the effects of vibration, was developed to achieve 3D one-shot imaging with improved lateral resolution [169]. Polarization Mirau interferometry makes it possible to image live cells in a medium without coverslips.…”

Section: Improvement Of Measurement Resolutionmentioning

confidence: 99%

An insight on optical metrology in manufacturing

Shimizu

Chen

Kim

et al. 2020

Meas. Sci. Technol.

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Optical metrology is one of the key technologies in today's manufacturing industry. In this article, we provide an insight into optical measurement technologies for precision positioning and quality assessment in today's manufacturing industry. First, some optical measurement technologies for precision positioning are explained, mainly focusing on those with a multi-axis positioning system composed of linear slides, often employed in machine tools or measuring instruments. Some optical measurement technologies for the quality assessment of products are then reviewed, focusing on technologies for form measurement of products with a large metric structure, from a telescope mirror to a nanometric structure such as a semiconductor electrode. Furthermore, we also review the state-of-the-art optical technique that has attracted attention in recent years, optical coherence tomography for the non-destructive inspection of the internal structures of a fabricated component, as well as super-resolution techniques for improving the lateral resolution of optical imaging beyond the diffraction limit of light. This review article provides insights into current and future technologies for optical measurement in the manufacturing industry, which are expected to become even more important to meet the industry's continuing requirements for high-precision and high-efficiency machining.

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Simultaneous immersion Mirau interferometry

Cited by 13 publications

References 14 publications

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

Mirau-based line-field confocal optical coherence tomography for three-dimensional high-resolution skin imaging

An insight on optical metrology in manufacturing

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