Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass

Abstract

Binary and continuous phase-only surface relief diffractive optical elements can be fabricated on hybrid sol-gel glass based on a single-step microfabrication process. We report on the fabrication and characterization of an inorganic-organic hybrid SiO 2 /TiO 2 sol-gel glass by UV light exposure. Preliminary results of binary and continuous surface relief structures fabricated on sol-gel glass with UV exposure using holographic technique and a high-energy-beam-sensitive (HEBS) glass mask are demonstrated. The effects of the fabrication parameters such as doping concentration, bake temperature, and UV light exposure time on the film characteristics (thickness and refractive index) are studied.

Fabrication of relief gratings on high photosensitive SiO 2 /ZrO 2 gel film by UV exposure

“…Zirconium tetra-n-butoxide (Zr(OBu) 4 ) was used as a starting material. It was modified chemically with β-diketones and then mixed with Tetraethyl orthosilicate.…”

“…Step 1: Zirconium tetra-n-butoxide(Zr(O-Bu) 4 ) was allowed to react with β-diketones in ethyl alcohol(EtOH) by stirring for 2 hours in a beaker. Two different β-diketones examined as a chemical modifier: acetylacetone(AcAc) and benzoylacetone(BzAc).…”

“…Conventional micro-fabrication technologies use a multi-step process that includes exposure of a photoresist film through a photomask, development, and wet or dry etching transfer of the optical structure into substrate material 2 . In recent years, hybrid Sol-Gel technology has been intensively studied as a potential alternative material for realization of high performance micro-optical elements [3][4][5] . The primarily push for this advancement is mainly due to the intrinsic material properties of sol-gel glass as a simple and cost-effective material with good optical properties.…”

Creation of doughnut laser beams using hybrid sol-gel glass

“…Recently several hybrid sol-gel materials and fabrication methods have been presented in our work [24][25][26][27][28][29]. In this paper, we apply the negative-tone hybrid sol-gel material [23] to fabricate a binary CGH for generating the doughnut beam.…”

Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography

“…That is helpful for the reality of multilevel optical element structures and should be take into account to the device design. In our previous work [9,10,11], we fabricated some diffractive optical devices with the sol-gel glass using various microlithography methods, such as laser holography, contact printing, and direct laser writing. In this paper we demonstrate the hybrid Si02/Ti02 glass can has the property of electron-beam sensitivity and investigated the response of the hybrid sol-gel glass to the electron-beam.…”