Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer

Ganji, Bahram Azizollah; Majlis, Burhanuddin Yeop

doi:10.1007/s00542-010-1093-x

Cited by 20 publications

(8 citation statements)

References 13 publications

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“…They choose Al to make the perforated diaphragm [91,131], as it has a low Young's Modulus (70 GPa). The same group also patterned a slotted Al diaphragm [92,95]. Slot is defined as a long lines of emptied space, which achieved the same effects as perforated holes.…”

Section: Methodsmentioning

confidence: 99%

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A Review of MEMS Capacitive Microphones

et al. 2020

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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Section: Methodsmentioning

confidence: 99%

“…The positively charged diaphragm (p-type semiconductor) and negatively charged backplate (n-type semiconductor) act as positive and negative terminals, respectively. Therefore, as can be seen from Table 1, most researchers employed Si and poly-Si as backplate material [39,43,47,67,88,95]. Few groups did opt for metals instead.…”

Section: Backplate Materialsmentioning

confidence: 99%

A Review of MEMS Capacitive Microphones

et al. 2020

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“…Figure gives the schematic fabrication process and exemplarily shows some typical rolled‐up nanomembranes using this technique. This approach has become a versatile method to fabricate micro/nanotubes out of all kinds of inorganic materials, including metals, insulators, and their combinations, on almost any flat substrates . As a result, a number of applications have been realized, including metal jet engines, optical resonators, fluidic sensors, and gas detectors .…”

Section: Release Methodsmentioning

confidence: 99%

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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chemical vapor deposition (CVD). When it comes to on-chip integrations, these strategies are limited by accessible materials and slow processing rate, [31] and the generated defects in the produced amorphous materials placed restrictions to its further applications in high-performance devices. [32] Therefore, novel approaches and methods of fabricating 3D micro/ nanostructures are highly demanded.Rolled-up nanotechnology is an alternative technique that fabricates 3D nanostructures out of planar films called nanomembranes. Nanomembranes are defined as planar thin films with thicknesses between one to a few hundred nanometers. [33] These nanomembrane materials behave like soft materials while maintaining excellent properties like their bulk counterpart and therefore is an ideal platform for fabricating 3D nanostructures. Inspired by concepts of origami and kirigami, [34][35][36][37] researchers folded and rolled these nanomembranes into a number of fascinating 3D structures. [17,[38][39][40][41][42][43][44] Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications. [33,41,[45][46][47] By releasing strain-engineered planar functional nanomembranes on sacrificial layers, complex rolled-up structures including tubes, [48][49][50][51][52][53][54] rings, [54][55][56] and helices [42,[57][58][59] can be constructed (for instance, see Figure 1f). This approach can be applied to engineer a wide range of organic and inorganic materials and their combinations, including metals, insulators, traditional semiconductor families, and recently emerged 2D materials. Given its compatibility to standard CMOS fabrication process and ability to manufacture large periodic arrays with precise geometric control, rolled-up nanotechnology further expands the applications of 3D nanostructures to a number of areas, including optical resonators, [60,61] photodetectors, [62,63] micromotors, [64][65][66] energy storage, [67] drug delivery, [68] gas detection, [53] and environmental decontamination. [69] The versatility in the materials design and geometric tuning in rolled-up nanotechnology presents tremendous opportunities for further developing sophisticated 3D fine structures.In this review, we focus on the materials perspective and fabrication process of rolled-up nanotechnology. First, we give a brief introduction of rolled-up mechanism, as well as its fabrication techniques and control strategies. We summarize and highlight recent advances of different materials systems and their corresponding rolling methodologies. Second, Rolled-up nanotechnology is an appealing technique that tunes planar films into complex 3D fine structures. The rolling-up mechanism and methodology of a huge variety of materials and their combinations are summarized, including metals, insulators, traditional semiconductor families, polymers, and recently emerged 2D materials. The basic principles of strain induction, fabrication methods, and techni...

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“…A large variety of perforated micro-electromechanical (MEMS) devices have been reported over the years. These include sensors and actuators from all fields of MEMS, such as MEMS microphones [1,2], accelerometers [3,4], rate sensors [5][6][7][8][9], resonators [10,11], optical devices [12], energy harvesting devices [13] and so on. Perforations are designed into MEMS structures to reduce damping forces [14].…”

Section: Introductionmentioning

confidence: 99%

The influence of perforation on electrostatic and damping forces in thick SOI MEMS structures

Ya’akobovitz

Krylov

2012

J. Micromech. Microeng.

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The influence of perforation on the electrostatic force for thick micro-electromechanical (MEMS) structures is analyzed theoretically and experimentally. A three-dimensional numerical model is provided in order to evaluate the influence of the fringe capacitive field on the electrostatic force. Several configurations of perforated MEMS structures were characterized under ambient air conditions and experimental results demonstrate good consistency with the model prediction. Moreover, a comparative study on the effect of perforation on damping (quality factor) was performed. A quality factor was experimentally determined by analyzing frequency response under electrostatic excitation and time response under pulse loading, and was compared to a few analytical models, which demonstrate reasonable agreement with the measured results. Our study demonstrates that perforation has a significant effect on the quality factor, while its contribution of the electrostatic fringe capacitive field ranges between additional few to few tens of per cents.

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Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer

Cited by 20 publications

References 13 publications

A Review of MEMS Capacitive Microphones

A Review of MEMS Capacitive Microphones

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

The influence of perforation on electrostatic and damping forces in thick SOI MEMS structures

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