Sm2O3 gate dielectric on Si substrate

Synthesis and characterization of Sm(OH)3 and Sm2O3 nanoroll sticks

“…The nanoroll sticks may be formed by the following anisotropic growth and folding mechanism. Sm(OH)(SO 4 ) seed with sheet morphology is initially formed, gradually transformed to Sm(OH) 3 and then the sheets anisotropically grow into longer sheets. Due to different growth directions, rates, and strains upon forming from Sm(OH)(SO 4 ) to Sm(OH) 3 The nanoroll sticks could also be synthesized for other rare earth compounds by a facial hydrothermal method by controlling the amount of ammonia and a reaction temperature.…”

“…Samarium oxide (Sm 2 O 3 ) is a high-k dielectric material and has extensively been studied for its potential application to alternative gate dielectric in complementary metaloxide-semiconductors (CMOS) and resistance random access memories (RRAM) [1][2][3][4]. Wang et al used high-k Sm 2 O 3 thin film as a pH-sensing layer [5].…”

“…Many effects have been devoted to synthesize diverse morphologies of Sm 2 O 3 . Sm(OH) 3 has also been prepared since Sm 2 O 3 could be obtained by a post-thermal dehydration [11,12]. Facial solution-based synthetic methods include hydrothermal [13][14][15], precipitation [11,16], solgel [18], and template [19] methods.…”

“…In the present study, we first prepared Sm(OH) 3 and Sm 2 O 3 nanoroll (rolled into nanotubes) sticks, which were then characterized using various experimental techniques. The morphology could be controlled by an amount of ammonia and a reaction temperature.…”

“…The morphology could be controlled by an amount of ammonia and a reaction temperature. Because new morphology generally exhibits different physicochemical properties and application performances [26] the newly found nanoroll stick morphology provides new insight for developing Sm(OH) 3 and Sm 2 O 3 nanostructures for various applications including high-k materials, catalysts, and sensors.…”