In this work, the effect of self-heating on small-signal parameters of In0.53Ga0.47As based gate-all-around nanowire MOSFETs is explored using thermally calibrated simulation results. The effects of interfacial thermal resistance (ITR) of Al2O3/In0.53Ga0.47As interface, the number of nanowires (N), and ambient temperature
(
T
A
)
on RF performance metrics such as transition frequency
(
f
t
)
, max-oscillation frequency
(
f
max
)
, intrinsic current gain
(
h
21
)
, power gain (maximum available gain/maximum stable gain), and transconductance
(
g
m
)
are thoroughly investigated in order to assess the self-heating induced degradation. The impact of self-heating has also been observed on small-signal parameters such as C
gd, C
gs, R
gd, R
gs, and τ. Transition frequency and maximum oscillation frequency decrease significantly when lattice temperature rises because of self-heating. The order of ITR for Al2O3/In0.53Ga0.47As interface has been reported to be
10
−
5
cm
2
K
W
−
1
in the technical literature. Increasing ITR from 10−5 to
10
−
4
cm
2
K
W
−
1
decreases f
t and f
max by 12 and 70 GHz, respectively.