Soft-impacting micromechanical resoswitch zero-quiescent power AM receiver

Liu, Ruonan; Nilchi, Jalal Naghsh; Li, Wei‐Chang; Nguyen, C.T.-C.

doi:10.1109/memsys.2016.7421555

Cited by 22 publications

(9 citation statements)

References 5 publications

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“…Comparing ( 5) with (6), the analogy between the mechanical and equivalent electrical models can be summarized in Table 1 [13].…”

Section: Resultsmentioning

confidence: 99%

“…Among them, the lithography and the etching step are the main causes that pose limitation on the minimum feature size. The minimum feature size determines the capacitive gap spacing including the transducers and the gap distance between the resonator and the output electrode, all of which in turn affect the coupling strength and driving sensitivity [6].…”

Section: Introductionmentioning

confidence: 99%

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Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

Tsai

2023

Micro & Nano Letters

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This work enhances the driving sensitivity of micromechanical vibro-impact resonators by reducing the output switching gap. Differing from previous works for gap narrowing that either require a dedicated pull-in bias voltage and stopper structures or post-fabrication refill processes, the use of the snap-through technique calls for only the initial activation step without the need for constantly applied voltage or additional process steps. Doing so realizes a final gap spacing from a typical 2-µm limitation to a 0.9-µm sub-micron gap. While probes are used to mechanically initiate the bistable transition in this proof-ofconcept demonstration, this could be done electrically once properly designed actuation electrodes are available. This transducer gap narrowing technique can help facilitate higher sensitivity for vibro-impact resonator embedded applications such as zero-quiescent power communication receivers.

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“…Comparing ( 5) with (6), the analogy between the mechanical and equivalent electrical models can be summarized in Table 1 [13].…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

Tsai

2023

Micro & Nano Letters

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“…Recent advances in micro-electromechanical system (MEMS) techniques provide new solutions for signal demodulation [3]. Researchers have focused on the improvement of MEMS electrostatic [4][5][6][7][8] or thermal [9][10][11][12] mixer-filters to replace the traditional mixer and low-pass filter (LPF) in RF receivers. To acquire a higher quality of factor and sensitivity, they attempt different approaches, including mechanism analysis, structure optimization, and process/material improvement [13][14][15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

A Cascaded MEMS Amplitude Demodulator for Large Dynamic Range Application in RF Receiver

Yan

Liao

et al. 2021

Micromachines

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An amplitude demodulator with a large dynamic range, based on microelectromechanical systems (MEMS), is proposed in this paper. It is implemented as a cascade of a capacitive and a thermoelectric sensor. Two types of the transducer can improve the measurement range and enhance the overload capacity. This MEMS-based demodulation is realized by utilizing the square law relationship and the low-pass characteristic during the electromechanical and thermoelectric conversion. The fabrication of this device is compatible with the GaAs monolithic microwave integrated circuit (MMIC) process. Experiments show that this MEMS demodulator can realize the direct demodulation of an amplitude modulation (AM) signal with a carrier frequency of 0.35–10 GHz, and cover the power range from 0 to 23 dBm. This MEMS demodulator has the advantages of high power handling capability and zero DC power consumption.

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“…1). This relies on a solid-state envelope detector (ED) and a MEMS-based resonant cantilever switch [3][4] (RS) to achieve high sensitivity (P min =-60 dBm), zero stand-by power (P sb = 0) with low system complexity. The theory, fabrication and the experimental performance of WUR will be reported.…”

Section: Introductionmentioning

confidence: 99%

750 MHZ Zero-Power Mems-Based Wake-Up Receiver With -60 DBM Sensitivity

Cassella¹,

Assylbekova²,

Zhu³

et al. 2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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In this work, we present the first fully-passive RF wake-up receiver (WUR). The WUR relies on a solid-state envelope detector (ED) and a MEMS-based cantilever switch (RS) acting as a resonant comparator vibrating at 75.3 kHz. The device exhibits a quality factor (Q) of 4700 when operating in its linear regime (i.e. far from pull-in voltage). The demonstrated WUR enables the achievement of high sensitivity (P min =-60 dBm) while not consuming any standby power. For this reason, the presented WUR opens up exciting scenarios in the development of next-generation smart wireless sensors nodes operating within the Internet-Of-Things (IoT).

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Soft-impacting micromechanical resoswitch zero-quiescent power AM receiver

Cited by 22 publications

References 5 publications

Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

A Cascaded MEMS Amplitude Demodulator for Large Dynamic Range Application in RF Receiver

750 MHZ Zero-Power Mems-Based Wake-Up Receiver With -60 DBM Sensitivity

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