Solute effect of arsenic on the microstructure and diffusion mechanism in platinum-silicides

Radioactive silicon as a marker in thinfilm silicide formationThe moving species during the formation of first-phase platinum silicide, Pt 2 Si, by thermal annealing is identified with inert markers (Ti, Co, Ge, As) and radioactive 31St as a tracer. Rutherford backscattering spectrometry is utilized to monitor the flow of atoms past the marker during the silicide forming reaction, while the position of the tracer after the reaction is determined by using sputter depth profiling and radioactivity measurements. Experiments with thin-film structures employing a reference marker at the substrate silicon/amorphous silicon interface and a mobile marker near the amorphous silicon/platinum interface clearly show a shift of the latter marker towards the surface of the sample. The radioactive tracer, initially embedded in nonradioactive silicon and metal, is moved from this position and concentrates at the sample surface. The outcome of both marker and tracer studies is consistent with a picture in which platinum diffuses during the formation of Pt 2 Si. 230 J.

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Solute effect of arsenic on the microstructure and diffusion mechanism in platinum-silicides

Cited by 6 publications

References 29 publications

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