Solving the inverse grating problem by white light interference Fourier scatterometry

Paz, Valeriano Ferreras; Peterhänsel, Sandy; Frenner, Karsten; Osten, Wolfgang

doi:10.1038/lsa.2012.36

Cited by 70 publications

(19 citation statements)

References 30 publications

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“…Similar techniques, referred to as interference Fourier scatterometry, were previously reported and applied to the nanoscopic lateral positioning and the characterization of sub-lambda features of 1D grating structures. 69,70 The technique of k-space optical microscopy is also sensitive to shifts in the axial position of the sample, i.e., to the defocusing of a periodic array. This has potential applications for auto-focus systems in optical microscopy.…”

Section: F Accurate Lateral and Axial Positioning Of The Samplementioning

confidence: 99%

k-space optical microscopy of nanoparticle arrays: Opportunities and artifacts

Bryche

Barbillon

Bartenlian

et al. 2018

Journal of Applied Physics

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We report on the performance and inherent artifacts of k-space optical microscopy for the study of periodic arrays of nanoparticles under the various illumination configurations available on an inverted optical microscope. We focus on the origin of these artifacts and the ways to overcome or even benefit from them. In particular, a recently reported artifact, called the "condenser effect," is demonstrated here in a new way. The consequences of this artifact (which is due to spurious reflections in the objective) on Fourier-space imaging and spectroscopic measurements are analyzed in detail. The advantages of using k-space optical microscopy to determine the optical band structure of plasmonic arrays and to perform surface plasmon resonance experiments are demonstrated. Potential applications of k-space imaging for the accurate lateral and axial positioning of the sample in optical microscopy are investigated.

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Section: F Accurate Lateral and Axial Positioning Of The Samplementioning

confidence: 99%

k-space optical microscopy of nanoparticle arrays: Opportunities and artifacts

Bryche

Barbillon

Bartenlian

et al. 2018

Journal of Applied Physics

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“…The spectral resolution is inversely proportional to the scanned time delay, similar to Fourier transform spectroscopy. 26 A powerful feature of this approach, common to many Fourier transform-based methods, [26][27][28] is that the full-source spectrum is used throughout the entire measurement, resulting in an efficient use of the available photon flux.…”

Section: Methodsmentioning

confidence: 99%

Lensless diffractive imaging with ultra-broadband table-top sources: from infrared to extreme-ultraviolet wavelengths

Witte¹,

Tenner

Noom³

et al. 2014

Light Sci Appl

106

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Lensless imaging is an approach to microscopy in which a high-resolution image of an object is reconstructed from one or more measured diffraction patterns, providing a solution in situations where the use of imaging optics is not possible. However, current lensless imaging methods are typically limited by the need for a light source with a narrow, stable and accurately known spectrum. We have developed a general approach to lensless imaging without spectral bandwidth limitations or sample requirements. We use two time-delayed coherent light pulses and show that scanning the pulse-to-pulse time delay allows the reconstruction of diffraction-limited images for all the spectral components in the pulse. In addition, we introduce an iterative phase retrieval algorithm that uses these spectrally resolved Fresnel diffraction patterns to obtain high-resolution images of complex extended objects. We demonstrate this two-pulse imaging method with octave-spanning visible light sources, in both transmission and reflection geometries, and with broadband extreme-ultraviolet radiation from a high-harmonic generation source. Our approach enables effective use of low-flux ultra-broadband sources, such as table-top high-harmonic generation systems, for high-resolution imaging.

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“…Due to the characteristics of high force, high stiffness, high resolution and fast response, piezostack is a typical actuator for ultraprecision motion and positioning [1][2][3][4]. A major drawback of conventional piezostack, which limits its applications, is its relatively small deformation range.…”

Section: Introductionmentioning

confidence: 99%